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Cathodoluninescence

Cathodoluminescence (CL) is a nondestructive technique based on the emission of light from a material upon excitation by a high energy electron beam (or “cathode ray”). The CL detector fitted in a SEM microscope can be used as a powerful tool to characterize semiconducting materials in growth and device process development and probe:

  • Optical and Electronic properties
  • Trace elements/dopants
  • Band Gap
  • Crystal structure
  • Impurities
  • Presence and type of defects
  • Variation in composition
  • Carrier dynamics
  • Changes in elastic strain
  • Depth-resolved information

HORIBA offers CL one port-interface solutions that are compatible with all commercial SEM and FIB systems. With its wide emission energy ranging from 0.5 to 6 eV, its Raman capability, and its spatial resolution ranging from µ to nano, the Horiba CLUE systems can analyze a broad panel of semiconducting materials: group IV, II-VI, III-Vs, III-nitrides, wide band gap (SiC), 2D materials, Quantum dots, Nanowires as well as devices for optoelectronics, photovoltaics, LEDs.
 

 
 F-CLUEH-CLUER-CLUE
CouplingFiberDirectFiber
CompatibilityAll SEMsAll SEMsAll SEMs
CollectionMotorized Paraboloid mirror with fully retractable mechanism
AutomationFully automated
Signal collectionImagingCL, Spectral & Hyperspectral CL, Time-resolved CLImaging CL, Spectral & Hyperspectral CL, Time-resolved CL, Angular-resolved CLRaman, PL, CL

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