GR-500 Series

Wafer Back Side Cooling System

The GR-500 Series provides stable, high-accuracy pressure control of heat-transfer gases such as helium and argon, which are essential for wafer backside temperature control. Its high stability and accuracy make it ideal for wafer cooling applications.

Segment: Semiconductor

Division: Fluid Control

Manufacturing Company: HORIBA STEC, Co., Ltd.

Request for Information

Do you have any questions or requests? Use this form to contact our specialists.

First name

Last name *

Company or Institution *

Postal code *

City

Country/Region *

State

Email address *

Phone

HORIBA Department

Your message *

I have read and agree to the HORIBA privacy notice

* These fields are mandatory.

Corporate