| Model name | HF-700A |
|---|---|
| Measurement method | Fluoride ion electrode method |
| Measurement range | 0 - 1000mg/L (0 - 100/200/500/1000mg/L) |
| Repeatability | Within +/- 2% of the full scale |
| Stability | Within +/- 2% of the full scale/10 min. |
Low Concentration Monitor- Sulfuric Acid/Hydrogen Peroxide HF-700A
The HF-700A stabilizes hydrofluoric concentrations on the order of ppm in diluted sulfuric acid and hydrogen peroxide to enable continuous measurement and allow effective process management of the removal of the polymer residue following the etching process.
Segment: Semiconductor
Division: Wet Process Control
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.
