TEOS, TMOB, TMOP, TEOP, BTBAS
Pressure movement from He gas
Gas supply pressure
For pressure movement: 0.3 to 0.6 MPa (G); For purge: 0.3 to 0.6 MPa (G), OP N2 0.6 to 0.7 MPa (G)
Maximum 5-gallon container can be attached (outside of production range)
Automatic supply/stop using external signal from supply system
Operation area display details
Pressure error display; When an alarm is triggered: Display hold function (manual reset); Liquid level display; Sequence, etc.
Refer to basic flow
AC 100 to 240 V, 50/60 Hz, 300 VA
AC 100 to 240 V breaker connection, signal receptacle
See external dimensions diagram
* Please make decisions regarding the specifications above after meeting with STEC.