*1 Please contact us for supported kinds of gas and glowrates.
*2 This is guaranteed value under 25 ℃ and ≤ 1.0 × 10-3 Pa (A).
*3 Output noise is included in Repeatability.
*4 Setting time is MFC output signal and N2 gas at 23 ℃. Other detail definition follows setting time of "SEMI Standard E17-1011 Section 4.1.4".
*5 Pressure perturbation has to be smaller than 20 % pressure change per second and ±70 kPa/sec (±10 PSI/sec).
*6 The "(TYP.)" value is a representative ability value at the time of in-house verification.
*7 PFA means Poly [tetrafluoroethylene-co-perfluoro (alkyl vinyl ether)]
*8 PCTFE means Polychlorotrifluoroethylene.
*9 After installation, be sure to perform zero point adjustment refer to "D707WR Zero Adfustment Procedure".
*10 EtherCAT® is a registered trademark and patented technology, licensed by Beckhoff Automation GmbH in Germany.