VU90 Spectrometer

Most Compact Vacuum UV Back-Illuminated CCD Spectrometer (VUV-FUV)

Horiba has developed a compact size Vacuum Ultraviolet (VUV) Spectrometer with a dedicated CCD Camera Syncerity-VUV, all manufactured in its NJ facility. This unique system features a special CCD sensor with high sensitivity in the far-UV wavelength range with capability to measure from 115 nm with a resolution better than 0.5 nm under vacuum or high purity nitrogen. The system’s internal optical cavity can be black coated for ultimate suppression of stray light.

For OEM VUV Industrial Applications

VUV Emission & Fluorescence

VUV Transmission & Reflectance

GCVUV: Alternative to Conventional Gas Chromatography

Examples:

Metrology
Photolithography
Petrology
Environmental Monitoring
Flavors & Fragrances
Food & Beverage Safety

*Available in select countries.

You can email OEM Technical Sales at: OEM.US(at)horiba.com or contact OEM at: +1.732.494.8660 Ext. 7733

First portable and most affordable VUV spectrometer
Smallest VUV system footprint on the market
Ultra high throughput combined with unmatched low stray light performance
High resolution of 0.5 nm Selectable resolution and throughput
Deep-cooled CCD with high quantum efficiency
Extendable wavelength coverage from Far UV to UV-VIS-NIR

CCD Quantum Efficiency

UV hardened sensor provides increased lifetime, however no warranty is provided on any sensor exposed to VUV

Stray Light Comparison

Stray light comparison between uncoated and coated cavity (Super Black) measured by far field illumination using tungsten lamp – zero order

Spectrum of Deuterium

Spectrum of Deuterium lamp shows enhanced sensitivity starting from 113 nm with 22 µm slit (0.45 nm resolution)

VUV System Slit Interchangeability Test

VUV system slit interchangeability test with 40 µm pinhole and 22 µm slit

View different setups of FUV system and Adjustable Resolution and Throughput

OEM Spectrometer Selection Guide

View and Download our OEM Spectrometer Selection Guide

You can email OEM Technical Sales at: OEM.US(at)horiba.com or contact OEM at: +1.732.494.8660 Ext. 7733

General Spectrometer Specifications
Spectral Coverage	115 - 230 nm Full coverage on CCD: 115 - 320 nm (No order sorting filter available)
Spectral Resolution	0.5 nm with 22 μm pinhole, 0.75 nm with 40 μm pinhole
Spectral Dipersion	12 nm/mm; 0.17 nm/pixel
Focal Length	90 mm
VUV Optics	MgF₂ coated grating and mirror
Vacuum or Nitrogen Purged Mode	~ 10^-6 Torr with turbomolecular pump. Helium leak test performed at factory. N2 high purity nitrogen constant purge required
Options	Selection of different heights of VUV CCDs Kinematic mounts to interchange Pinholes (or Slits) Bare metal finish is standard: Super black coating reduces stray light
F/#	~ F/10
Software	LabVIEW Acquisition sortware for initial evaluation (DLLs provided for software integration)

Vacuum Camera Specifications (Syncerity® VUV 2048 pixel BI Sensor)*
Quantum efficiency at 20°C (see plots below)	Standard	Special
CCD Sensor Format	2048 x 70	Optional increased heights available
CCD Pixel Size	14 x14 μm
CCD Height	1 mm
CCD QE	3 options - refer to graphs below
Camera Window	2 options - no window for lowest VUV response or MgF₂ window
Deep Thermoelectric Cooling	-45°C under vacuum (10-6 mbar) with +25°C ambient or -25°C under N₂ purging
Single Pixel Well Capacity	50,000 e¯/pixel (minimum); 60,000 e¯/pixel (typical)
Serial Register Full Well Capacity	250,000 e¯/pixel (minimum); 500,000 e¯/pixel (typical output register saturation)
Scan Rates	45 kHz and 500 kHz
Readout Noise (at 45 kHz and at –45°C)	10 e¯ (typical) to 14 e¯ (maximum)
Readout Noise (at 500 kHz and at –45°C)	20 e¯ (typical) to 25 e¯ (maximum)
Maximum Spectral Rate	20 Hz at 45 kHz scan rate; 189 Hz at 500 kHz scan rate
Digitization	16-bit ADC
Dynamic Range (typical for single pixel)	55,500:1
Non-linearity (measured on each camera)	<0.15% (typical) at 45 kHz (0.4% maximum)
Non-linearity (measured on each camera)	<0.20% (typical) at 500 kHz (1% maximum)
Dark Current at –45°C Note: Pixel size = 14 μm	0.1 e¯ /pixel/s (typical)
Software-adjustable Gains	2, 4, and 10 e¯ /count at –45°C
Environmental Conditions	Operating temperature 15°C to 40°C ambient
	Relative humidity <70% (non-condensing)
	Storage temperature -25°C to 45°C
Power Requirements AC/DC Power Supply (provided)	90-264 VAC, 47–63 Hz