There are various types of abatement equipment, including combustion, plasma, heater, dry, and catalytic systems. Point-of-use (POU) abatement is connected to multiple chambers for each process (Dry Etching, CVD), and there is a demand for improved abatement efficiency. As a means of measuring the abatement efficiency, the in-line INDIR: IR-400 series and the Q-Mass: RGA described in the EPA430 protocol will help customers improve their measurement and detection capabilities.
Accurate measurement and control of GHG emissions are essential in semiconductor manufacturing facilities. HORIBA’s compact IR Series In-line Gas Monitors use non-dispersive infrared (NDIR) technology and can be easily installed in existing exhaust lines or integrated into abatement systems, including high-temperature lines up to 150°C. Real-time gas concentration monitoring enables feedforward/feedback control to optimize equipment operation and reduce energy and resource consumption.
High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring
Quadrupole Mass Analyzer
