HORIBA - Semiconductor

Vacuum Coating

HORIBA is one of the world's largest gas and liquid mass flow controller manufacturers, with a range of analogue, digital and high temperature mass flow controllers along with the point of use liquid source vaporization control and delivery systems.

HORIBA can deliver the critical control needed for the success in your coating industry manufacturing lines such as Chemical vapour deposition (CVD), Atomic layer deposition (ALD), metal organic chemical vapour deposition (MOCVD), PVD (physical vapour deposition), Plasma enhanced chemical vapour deposition (PECVD) and Diamond layer or Diamond layer coating (DLC). We offer a comprehensive range of fluid control and process monitoring to improve yield, increase throughput and add value to your Coating Process.

HORIBA has one of the world’s smallest quadrupole mass spectrometers allowing it to operate at a much higher pressures (1 Pa) than the larger traditional systems. This results in a reduction in the need for additional pumping equipment.

Related Products

MICROPOLE System
mehr MICROPOLE System

Compact Process Gas Monitor

RU-1000
mehr RU-1000

Plasma Emission Controller

SEC-E Series
mehr SEC-E Series

Mass Flow Controller

SEC-N100 Series
mehr SEC-N100 Series

Digital Mass Flow Controller

VG Series
mehr VG Series

Capacitance Manometer

REQUEST FOR INFORMATION

Do you have any questions or requests? Use this form to contact our specialists.