MI-1000/MV-1000

Mixed Injection System Liquid Vaporizers MV-1000
Mixed Injection System Liquid Vaporizers MI-1000

Mixed Injection System Liquid Vaporizers

This mixed injection system can rapidly vaporize a wide variety of liquid sources by using the gas-liquid mixture vaporization method. This method allows for the stable vaporization of high boiling point liquids.

Segment: Semiconductor
Division: Fluid Control
Fabricant: HORIBA STEC, Co., Ltd.
  • The gas-liquid mixture vaporization method enables stable vaporization of high boiling point liquids
  • Compact design allows for easy integration
  • Vaporization efficiency is higher than with traditional vaporization methods
  • Larger flows can be generated
  • Vaporization temperature can be reduced.

 

Measurement Techniques 

Injection method
The following are the major steps involved in vaporizing a liquid source and supplying it to the process chamber.
1. The liquid source's flow rate is measured and the amount of liquid is fed back and controlled by the valve.
2. The liquid is instantaneously and completely vaporized.
3. The gas is released without being allowed to condense back into its liquid form.

Since the pressure of the carrier gas is higher ahead of the nozzle inside the injector, it can be heated efficiently. The liquid source and the heated carrier gas are mixed together in the gas/liquid mixing area in front of the nozzle, as this mixture passes through the nozzle the pressure is reduced causing the mixture to vaporize.

 

Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Optical Fiber Manufacturing Process in Electrical Equipment
Optical Fiber Manufacturing Process in Electrical Equipment
Liquid Source Vaporization and Supply in Research and Testing Laboratories
Liquid Source Vaporization and Supply in Research and Testing Laboratories

Request for Information

Do you have any questions or requests? Use this form to contact our specialists.

* These fields are mandatory.

Related products

EC-5000 Series
EC-5000 Series

Exhaust Pressure Controller

EV 2.0 Series
EV 2.0 Series

Endpoint / Chamber Health Monitor based on Optical Emission Spectroscopy and MWL Interferometry

EV-140C
EV-140C

Optical Emission Spectroscopy Etching End-point Monitor

LE Series
LE Series

Large Flow Liquid Source Vaporization Control System

LF-F/LV-F Series
LF-F/LV-F Series

Digital Liquid Mass Flow Meters / Controllers

LSC series
LSC series

Compact Baking System

LU Series
LU Series

Liquid Auto Refill System

MV-2000
MV-2000

Mixed Injection System Liquid Vaporizer

PV Series
PV Series

Piezo Actuator Valve

SEC-8000 F/D/E Series
SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller

SEC-N100 Series
SEC-N100 Series

Digital Mass Flow Controller

SEC-Z500X Series
SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

UR-Z700 Series
UR-Z700 Series

Digital Automatic Pressure Regulator

VC Series
VC Series

Direct Liquid Injection System

CRITERION D500
CRITERION D500

Pressure Insensitive Mass Flow Module

CVS-ONE
CVS-ONE

Constant Volume Sampler

D700MG
D700MG

High Speed & Precision Pressure Insensitive Mass Flow Module

D700T
D700T

Best Performance Pressure Insensitive Mass Flow Module

D700uF
D700uF

Micro Flow Pressure Insensitive Mass Flow Module

D700WR
D700WR

Wide Range Pressure Insensitive Mass Flow Module

DZ-100
DZ-100

Ultra-thin Mass Flow Module

EXFM-ONE
EXFM-ONE

Ultrasonic Exhaust Flow Meter

FQ Series
FQ Series

Fuel Flow Measurement Systems

FS-3000
FS-3000

Thermal Flow Splitter

HyFQ-2000 Series
HyFQ-2000 Series

Hydrogen Fuel Flow Meter

LE Series
LE Series

Large Flow Liquid Source Vaporization Control System

LF-F/LV-F Series
LF-F/LV-F Series

Digital Liquid Mass Flow Meters / Controllers

LSC series
LSC series

Compact Baking System

LU Series
LU Series

Liquid Auto Refill System

MV-2000
MV-2000

Mixed Injection System Liquid Vaporizer

PTFM-1000V2
PTFM-1000V2

Pitot Tube Exhaust Flow Meter

PTFM-ONE-DT
PTFM-ONE-DT

Dual Pitot Tube Exhaust Flow Meter

SEC-8000 F/D/E Series
SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller

SEC-E Series
SEC-E Series

Mass Flow Controller

SEC-N100 Series
SEC-N100 Series

Digital Mass Flow Controller

SEC-Z500X Series
SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

SEC-Z700S Series
SEC-Z700S Series

New concept Pressure Insensitive Mass Flow Module

SEC-Z700X Series
SEC-Z700X Series

Pressure Insensitive Mass Flow Controller

VC Series
VC Series

Direct Liquid Injection System

MV-2000
MV-2000

Mixed Injection System Liquid Vaporizer

Corporate