Spectroscopic Ellipsometry

The most suitable technique for thin film characterization

Spectroscopic ellipsometry is a surface-sensitive, non-destructive, non-intrusive optical technique widely used for thin layers and surface characterization. It is based simply on the change in the polarization state of light as it is reflected obliquely from a thin film sample. Depending on the type of material, spectroscopic ellipsometers can measure thickness from a few Å to tens of microns. It is also an excellent technique for multi-layers measurement.

Spectroscopic ellipsometry allows a range of thin film properties to be characterized, like layer thickness, optical properties (n,k), optical band gap, interface and roughness thickness, film composition, uniformity by depth and area, and more.

Materials suitable for spectroscopic ellipsometry include semiconductors, dielectrics, polymers, organics, and metals. Ellipsometry can also be used to study solid-liquid or liquid-liquid interfaces.

HORIBA spectroscopic ellipsometers use innovative technology to perform high frequency polarization modulation measurements without any mechanical movement, thus giving a faster, wider range and higher precision of characterization when compared to conventional ellipsometers.

Videos & Webinars

Learn more about spectroscopic ellipsometry by viewing educational videos and discover some of the applications with our collection of webinars.



Our trainers are experts in spectroscopic ellipsometry. They will provide trainings advice and guidance to make the most of your HORIBA Scientific instrument.
You will gain confidence and experience in the analysis of your samples.

Technology & FAQ

Spectroscopic ellipsometry is a non-destructive, non-contact, and non-invasive optical technique which is based on the change in the polarization state of light as it is reflected obliquely from a thin film sample. Learn more about this technique on the Technology pages.


Studying perovskite solar cells with HORIBA Scientific equipment

With their ~20 % efficiency, hybrid perovskite solar cells are the new promising candidate for next generation photovoltaics. Thanks to the wide HORIBA Scientific portfolio, different techniques can be used to gain in depth knowledge on the optoelectronic properties and mechanisms of this class of materials. In this application note we decided to use spectroscopic ellipsometry, steady-state and time-resolved fluorescence and Glow Discharge Optical Emission Spectroscopy to investigate the properties of CH3NH3PbI3 thin films deposited on a spin-coated PEDOT:PSS. The impact of the exposure to air was addressed.

Read more

Optical characterization of CIGS by Spectroscopic Ellipsometry

Discover the webinar from Dr Arnaud Etcheberry (ILV, Versailles, France)

View the webinar

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Spectroscopic Ellipsometer from FUV to NIR: 190 to 2100 nm

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Spectroscopic Ellipsometer for Simple Thin Film Measurement

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Powerful and Cost Effective Spectroscopic Ellipsometer

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