Stand-alone Type Chemical Concentration Monitor
The CS-100 Series offers a complete lineup of high precision chemical solution concentration monitors for various solutions in cleaning and etching processes during semiconductor manufacturing. In addition to the high-speed response and compact design, measurement of each component concentration is conducted in real-time and the timing of chemical solution changes and automatic supply is warned with an alarm. The ability to perform short measurement cycles allows for accurate monitoring of concentration changes.
|Measurement principle||Absorption spectroscopic method|
|Sample temperature||20 to 30 Degree C|
|Ambient temperature||20 to 25 Degree C|
|Components||Max. 4 components|
|Chemical range||Max. 4 ranges|
|Communication||Parallel I/O, Analog output, RS-232C|
|Max. 2 components|
|Dimension||205(W) X 329(D) X 269(H)mm|
|Power source||DC 24V|
|Consumable parts||Halogen lamp|
|Wetted material||PTFE, PFA, Sapphire or Quartz|
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