HE-960R-GC(W)

Carbon Sensor Resistivity Meter HE-960R-GC(W)

Carbon Sensor Resistivity Meter

The HE-960R-GC(W) is resistivity meter to use glass carbon for its sensor.
A glass carbon sensor is not contaminated by metal elution and is chemically resistant to such wet cleaning solutions as hydrofluoric acid and hydrogen peroxide. This is especially effective for resistivity measurement in the rinse process of single-bath cleaning systems and it enables high quality control in the cleaning process.

Segment: Semiconductor

Division: Wet Process Control

Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Superior chemical resistance
Free form metal contamination
High-speed response
Selectable temperature compensation function
Utilization of lead-free solder
DC 24 V power source
CE Marking compliant

Model	HE-960R-GC(W)
Measurement range	0.000 - 0.200 / 0.00 - 2.00 / 0.00 - 20.00 / 0.0 - 100.0 MΩ・cm
Power supply	Rated voltage 24 V DC 5 W (max)
Structure	Indoor-use panel installation type Panel: IP65 dust and water proof structure
Protective structure	Panel: IP65 (IEC60529, JIS C0920)
Conforming standards	CE Marking FCC Rule
External dimensions	96 (W) mm x 96 (H) mm x 115 (D) mm Case depth: approx. 105 mm (when panel-mounted)
Mass	Approx. 500 g
Compatible sensors	ERF-series specific resistance GC sensor

Schematics

〈Catalog〉Carbon Sensor Resistivity Meter HE-960R-GC

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