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Brochures-Analyzers for Wet Process
HE-960R-GC(W)
Carbon Sensor Resistivity Meter
The HE-960R-GC(W) is resistivity meter to use glass carbon for its sensor.
A glass carbon sensor is not contaminated by metal elution and is chemically resistant to such wet cleaning solutions as hydrofluoric acid and hydrogen peroxide. This is especially effective for resistivity measurement in the rinse process of single-bath cleaning systems and it enables high quality control in the cleaning process.
Segment: Semiconductor
Division: Wet Process Control
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.
- Superior chemical resistance
- Free form metal contamination
- High-speed response
- Selectable temperature compensation function
- Utilization of lead-free solder
- DC 24 V power source
- CE Marking compliant
| Model | HE-960R-GC(W) | |||||
|---|---|---|---|---|---|---|
| Measurement range | 0.000 - 0.200 / 0.00 - 2.00 / 0.00 - 20.00 / 0.0 - 100.0 MΩ・cm | |||||
| Power supply | Rated voltage 24 V DC 5 W (max) | |||||
| Structure | Indoor-use panel installation type Panel: IP65 dust and water proof structure | |||||
| Protective structure | Panel: IP65 (IEC60529, JIS C0920) | |||||
| Conforming standards | CE Marking FCC Rule | |||||
| External dimensions | 96 (W) mm x 96 (H) mm x 115 (D) mm Case depth: approx. 105 mm (when panel-mounted) | |||||
| Mass | Approx. 500 g | |||||
| Compatible sensors | ERF-series specific resistance GC sensor | |||||
Schematics
![LAQUA EC1100 [No longer available]](http://static.horiba.com/fileadmin/Horiba/_processed_/d/9/csm_EC-1100_BenchMeters-HORIBA_87ad2e01ce.png "LAQUA EC1100 BenchMeters")
