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Brochures-Analyzers for Wet Process
CS-100 Series
Stand-alone Type Chemical Concentration Monitor
The CS-100 Series offers a complete lineup of high precision chemical solution concentration monitors for various solutions in cleaning and etching processes during semiconductor manufacturing. In addition to the high-speed response and compact design, measurement of each component concentration is conducted in real-time and the timing of chemical solution changes and automatic supply is warned with an alarm. The ability to perform short measurement cycles allows for accurate monitoring of concentration changes.
Example of chemicals can be measured
Segment: Semiconductor
Division: Wet Process Control
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.
- Concentration follow-up in real-time
- Fully automatic measurements
- Comprehensive measure to eliminate air bubble during sequential measurements
- A higher safety assurance by using 24 V DC
- Lightweight and compact design
- A higher overall yield
- RoHS compliant
Model name | CS-100 |
|---|---|
| Measurement principle | Absorption spectroscopic method |
| Sample temperature | 20 to 30 Degree C |
| Ambient temperature | 20 to 25 Degree C |
| Components | Max. 4 components |
| Chemical range | Max. 4 ranges |
| Communication | Parallel I/O, Analog output, RS-232C |
| Analog output (4-20 mA) | Max. 2 components |
| Dimension | 205(W) X 329(D) X 269(H)mm |
| Power source | DC 24V |
| Consumable parts | Halogen lamp |
| Wavelength | UV/NIR |
| Wetted material | PTFE, PFA, Sapphire or Quartz |
Schematics
