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Brochure-HZ-960_HAE-T0140C
HZ-960
Dissolved Ozone Monitor
High precision, wide-range dissolved ozone monitor. The repeatability: F.S. +/- 0.2%. Can select the 4 types of measurement range in-line detectors.
Segment: Semiconductor
Division: Wet Process Control
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.
- High precision. Repeatability: F.S. +/- 0.2%
- Wide range measurement
0 - 10 mg/L (ZH-10 Sensor)
0 - 40 mg/L (ZH-40 Sensor)
0 - 100 mg/L (ZH-100 Sensor)
0 - 500 mg/L (ZH-500 Sensor) - Remote calibration
- RoHS compliant
| Corresponding detector | ZH-10 | ZH-40 | ZH-100 | ZH-500 |
|---|---|---|---|---|
| Measurement range | 0 - 10.00mg/L | 0 - 40.00mg/L | 0 - 100mg/L | 0 - 500mg/L |
| Supply temperature | 5 - 30 deg.C | 5 - 80 deg.C | ||
| Chemical contact material of detector | PFA, PTFE, quartz glass | |||
| Supply pressure | Within 0.5 MPa | |||
| Repeatability | +/- 0.2% of full scale | |||
| Linearity | +/- 1.0% of full scale | |||
| Transmission output | Number of output: 2 | |||
| Contact output | Number of output: 5 | |||
| Contact input | Number of input: 2 | |||
| Communication output | RS-485 | |||
| Power supply | Rated voltage 24 +/- 10% V DC, 15W | |||
Schematics
