VG Series

Capacitance Manometer

VG 시리즈 캐패시턴스 압력계입니다. 캐패시턴스 매노미터 VG 시리즈는 소형이며 자체 온도 조절 유형이 있는 올메탈입니다.

Segment: Semiconductor

Division: Dry Process Control

Manufacturing Company: HORIBA STEC, Co., Ltd.

Compact self heating design
High performance and high stability resulting from innovative electrode structure
Excellent corrosion resistance with Ni alloy diaphragm
Set point output (2 points)
Alarm output
Range adjustment by dedicated software
ONE PUSH ReZero
Power requirements +/-15VDC or 24VDC
CE & RoHS compliant

Technical Article

Development of Capacitance Diaphragm Gauge (1.3MB)

Abstract
"In the deposition process or an etching process that made to be used for the fabrication of LEDs, semiconductors, FPDs and solar cells, various gases are used and the process pressure gives large effect on product quality, so the excellent corrosion resistance, and without gas dependent, and high accuracy are required to vacuum gauge . To provide solutions to these requests, HORIBA STEC has developed the Capacitance Diaphragm Gauge “VG-200 Series”, and the results of the performance evaluation were superior reproducibility and long term stability. Here, we describe the product features and performance evaluation results of the VG-200."

Model		VG-200
Full Scale Range	133.32Pa	1.3332kPa/13.332kPa/133.32kPa
Sensor Controled Temperature	55°C/100°C
Accuracy Including non-linearity, hysteresis, non-repeatability *	0.5%R.S.	0.25%R.S.
Resolution	0.03%F.S	0.01%F.S
Zero Temp. Coefficient	0.005%F.S./°C	0.0025%F.S./°C
Span Temp. Coefficient	0.03%R.S./°C	0.02%R.S./°C
Operating Temperature	10°C to 45°C(55°C),10°C to 50°C(100°C)
Response time	<60msec
Warm Up time	60min(55°C),120min(100°C)
Proof Pressure	350kPa(A)
Output	Analog 0-10V, load resistance: 10kΩ or more
Supply Voltage	±15VDC ±5% or 24VDC±5% @0.6Amax
Setpoint	Contact form: 1a,1b, Number of setpoint: 2 Current charge capacity: 0.1A @30VDC

* Including non-linearity, hysteresis, non-repeatability at 25℃ ambient temperature after 2hours operation.

Type / Specification

	1. Full scale	2. Heater set temperature	3. Fitting
VG-221	10T：133.32Pa (1Torr) 11T : 1.3332kPa(10Torr) 12T : 13.332kPa(100Torr) 13T : 133.32kPa(1000Torr)	055 : 55°C 100 : 100°C	KF16 : KF16 8CR : 1/2VCR-F CF34 : ICF34

1. Full scale

2. Heater set temperature

3. Fitting

VG-221

10T：133.32Pa
(1Torr)

11T : 1.3332kPa(10Torr)

12T : 13.332kPa(100Torr)

13T : 133.32kPa(1000Torr)

055 : 55°C
100 : 100°C

KF16 : KF16
8CR : 1/2VCR-F
CF34 : ICF34

● Please choose full scale,heater set temperature and fitting. ● Please contact us If you need alarm initial setting.

External Dimension