Carbon Sensor Conductivity Meter (Low concentration type)

A low-concentration conductivity meter that adopts a highly chemical-resistant carbon sensor.

Ideal for chemical measurements in semiconductor wet processes. This unit measures conductivity and is perfect for management of concentration during processes, management of chemical dilution, and monitoring the recycling of ultra-pure water.


AC(100-240V)Transmission OutputContact OutputAutomatic CalibrationLow Concentration

Segment: Semiconductor
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Sensor with Excellent Chemical Resistance and Pressure Resistance

By employing a special electrode, it is ideal for measuring the conductivity of DIW (de-ionized water) rinse after chemical processing and for measurements in the circulation line.

Metal Contamination-free

With the use of a special carbon material as the electrode, there is no concern of metal contamination.

Abundant Temperature Compensation Features

Choices can be made concerning temperature characteristics for ultra-pure water (reference temperature 25°C), NaCl temperature characteristics, and temperature compensation coefficients at the reference temperature. This allows for temperature compensation tailored to the liquid to be measured.



(Cell constant : 0.1/cm)


(Cell constant : 1/cm)

Conductivity0.00 to 20.00 µS/cm0.0 to 200.0 µS/cm0.0 to 200.0 µS/cm0 to 2000 µS/cm*1
 20.00 to 70.00 µS/cm200.0 to 999.9 µS/cm200.0 to 700.0µS/cm2000 to 9999 µS/cm*2

*1 Within +/- 0.5% of the full scale

*2 Within +/- 1.0% of the full scale


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