Chemical Concentration Monitor (CS Series)

The concentration monitoring of chemical solutions play an advanced role as a vital part of the "Monitor → Feedback → Control" process control in accordance to the evolution of semiconductor processes. HORIBA has a wide product lineup of chemical concentration monitors specialized for chemical concentration management from FEOL to BEOL in order to fulfil the clients’ needs.

Non-Contact Chemical Concentration Monitor

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

Fiber Optic Type Chemical Concentration Monitor

Fiber Optic Type Chemical Solution Concentration Monitor

High Precision, High Stability Chemical Concentration Monitor

Stand-alone Type Chemical Concentration Monitor

Corporate