SLIA-300

Highly Sensitive Silica Monitor SLIA-300

Highly sensitive silica monitor for ultrapure water management in semiconductor/FPD processes

A proven track record in silica analysis of ultrapure water!
Compact/highly sensitive new performance.

Concentration of silica in ultrapure water has a significant impact on product precision and yield in semiconductor/FPD processes. Reliably meeting measurement requirements of 1μg/L (1ppb). High-sensitivity measurements across the entire measurement range in a compact desktop body design have been achieved. With excellent basic performance and high sensitivity, including high-speed responsiveness and self-diagnostic capabilities, it strongly supports the ultrapure water processes in semiconductor/FPD manufacturing.

SILICA

Segment: Semiconductor
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

High sensitivity with excellent repeatability

A unique newly developed cell realizes high sensitivity corresponding to low concentrations. Quick 5-minute measurements guarantee repeatability of ±2% of full scale in the 0 to 2 μg/L range.

Compact desktop design

A newly developed cell realizes a revolutionary compact design. This desktop design can be used in a variety of installation conditions, including small spaces. It is also possible to be used as a portable device.

Reagent consumption is reduced to 1/5

Adopting an improved reaction cell, the consumption of reagents has been reduced to 1/5 of conventional reagents. Running costs for reagents can be significantly reduced.

Capable of measuring up to 6 points (optional)

1 to 6 points of measurement can be freely set. A single unit can be used to support multipoint measurements.

Self-diagnostic function to monitor operational abnormalities

Self-diagnostic function detects abnormalities in operations such as sample and reagent injection, calibration errors, cell temperature monitoring, and abnormality in light source. In case of errors, a message is sent using an alarm indication lamp as well as text display to notify the user.

A maintenance-free, long-lasting light source that does not require replacement has been adopted

A monochromatic semiconductor light source with stable light intensity and long life is in use. It can be used as a semi-permanent light source.

ModelSLIA-300
PrincipleMolybdenum blue method
Measuring range0 to 2/0 to 20µg/L or 0 to 5/0 to 50 µg/L (specified when ordering)
Repeatability±2% of full scale
Measuring time5 minutes
Measuring cycle5 to 995 minutes
Indication· Measuring value: 3.5 digits, 7-segment LCD
· Guidance: 16 characters x 4 lines, dot matrix LCD
Measuring point1 to 6 points (specified when ordering)
CalibrationStandard calibration solution (from factory)
CompensationBlank, Calibration curve (per line)
Reagent· Reagent A: Sulfuric acid + ammonium molybdate
· Reagent B: Oxalic acid
· Reagent C: L (+) - ascorbic acid
Reagent replacement cycle1 week (Manufacture’s recommendation) 
Power100 to 240 V AC 50/60 Hz
Power consumptionApprox. 600 VA
Environment condition· Location: Indoor
· Temperature: 10 to 35°C
· Humidity: 85% or less
Sample condition· Sample water temperature: 15 to 35°C
· Flow rate: 200 to 250 mL/min (should be adjustable)
· Pressure: 0.1 to 0.5 MPa (to be constant)
Dimension375 (H) x 580 (W) x 500 (D) mm
14.8 (H) x 22.8 (W) x 19.7 (D) in
MassApprox. 41 kg (additional 1 kg per sampling point)
External input/outputOutput4 to 20 mA DC, 0 to 16 mA DC, or 0 to 1 V DC
(specified when ordering)
Contact output· Measuring lines (common): 
Measurement, Sync signal, Alarm※, Heater, 
Power-off calibration signal 1, 2,
Concentration upper limit, or Sample-off※
· Measuring lines (individually): 
Measuring range, Sample-off, or Concentration upper limit※
※marked notes should be specified when ordering.
Contact input· Measuring lines (common): 
Calibration start, Measurement start, 
Economy operation, Line selection, 
Low range measurement, High range measurement
Serial input/outputRS-232C
OptionSample heating unit, Standard solution supply unit, Reagent kit
Conformity StandardCE, KC, FCC RulesPart15, UKCA
Size: 1.22 MB
〈Catalog〉High Sensitivity Silica Monitor SLIA-300

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