HE-960H-TM

HE-960H-TM,HE-960H-KOH,HE-960H-TM-S

Wide range TMAH Concentration Monitor

A TMAH concentration monitor ideal for developer solution TMAH concentration management.

Featuring a highly chemical-resistant 4-pole carbon sensor, allowing the measurement of TMAH concentration, the main component of photoresist developer solutions, over a wide range.

CONDChemical Concentration

AC(100-240V)Transmission OutputContact OutputSingle Component

Segment: Semiconductor
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Wide-range compatibility

Measurement is possible in the TMAH concentration range of 0.000% to 10.00% with automatic decimal point adjustment.

Automatic switching of display range

Automatically switches the display range from high to low concentration.  Furthermore, it is feasible to monitor changes while preserving effective conductivity resolution.

Sensor with excellent chemical resistance

This sensor employs a chemically resistant 4-pole flow-through glass carbon sensor.

3 measurements

Capable of three types of measurements: TMAH concentration, conductivity, and temperature.

Concentration conversion function

Concentration conversion is possible by inputting the relationship between chemical concentration and conductivity along with the temperature characteristics.  It is particularly suitable for dilution management of low-concentration chemicals.

Indication Converter

ModelHE-960H-TM
Measurement range0 - 10%
Ambient environmentTemperature: -5 to 45°C, Relative humidity: 20 to 85 % (without condensation)
Power supply24 V DC ±10%, 10 W (max.)
Protective structurePanel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type)
MassApprox. 550 g
Conforming standardsCE marking, FCC Part 15
Compatible sensorsFES-510 series (flow-type carbon sensor)

Schematics

Request for Information

Do you have any questions or requests? Use this form to contact our specialists.

* These fields are mandatory.

Related products

514-22
514-22

1.41 mS/cm Conductivity Standard Solution

514-23
514-23

12.9 mS/cm Conductivity Standard Solution

9371-10D Conductivity Cell
9371-10D Conductivity Cell

Conductivity Cell for Ultra Pure Water Measurement

CS-100 Series
CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-100F1 Series
CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

CS-600F
CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-620F
CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-700
CS-700

High Precision, High Stability Chemical Concentration Monitor

CS-900
CS-900

Non-Contact Chemical Concentration Monitor

EG-100
EG-100

Washwater Monitoring System

H-1 Series
H-1 Series

Field-installation type water quality measuring instruments

HC-200F
HC-200F

Field-installation Type Fluoride Ion Concentration Meter

HC-200NH
HC-200NH

Field-installation type ammonia nitrogen meter

HC-300F
HC-300F

Field-installation Type Fluoride Ion Concentration Meter

HD-200
HD-200

Field-installation type dissolved oxygen meter (DO meter)

HD-200FL
HD-200FL

Field-installation type optical dissolved oxygen meter (DO meter)

HD-300
HD-300

Field-installation type dissolved oxygen meter (DO meter)

HD-480
HD-480

Panel-mount type dissolved oxygen meter (DO meter)

HD-960L
HD-960L

HF (Hydrofluoric Acid)  DO (Dissolved Oxygen) Monitor / Pure Water DO (Dissolved Oxygen) Monitor

HD-960LR
HD-960LR

Dissolved Oxygen Concentration Monitor Series for Semiconductor Manufacturing

H-1 Series
H-1 Series

Field-installation type water quality measuring instruments

HD-200
HD-200

Field-installation type dissolved oxygen meter (DO meter)

HD-300
HD-300

Field-installation type dissolved oxygen meter (DO meter)

HD-480
HD-480

Panel-mount type dissolved oxygen meter (DO meter)

HD-960L
HD-960L

HF (Hydrofluoric Acid)  DO (Dissolved Oxygen) Monitor / Pure Water DO (Dissolved Oxygen) Monitor

HD-960LR
HD-960LR

Dissolved Oxygen Concentration Monitor Series for Semiconductor Manufacturing

HE-200C
HE-200C

Field-installation type electric conductivity meter (conductivity meter)

HE-200H
HE-200H

Field-installation type electric conductivity meter

HE-200R
HE-200R

Field-installation type electric resistivity meter (resistivity meter)

HE-300C
HE-300C

Field-installation type electrical conductivity meter (conductivity meter)

HE-300R
HE-300R

Field-installation type electric resistivity meter (resistivity meter)

HE-480C
HE-480C

Panel-mount type conductivity meter (conductivity meter)

HE-480C-GC
HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type)

HE-480H
HE-480H

Panel-mount type conductivity meter (conductivity meter)

HE-480R
HE-480R

Panel-mount type resistivity meter (resistivity meter)

HE-480R(W)
HE-480R(W)

Resistivity Meter for Semiconductor Cleaning Processes

HE-960CA
HE-960CA

Citric Acid Monitor

HE-960CW
HE-960CW

Panel-mount type 2-channel conductivity meter (conductivity meter)

HE-960H-KOH
HE-960H-KOH

KOH Monitor

HE-960H-TM-S
HE-960H-TM-S

High Precision TMAH Concentration Monitor

HE-960HC
HE-960HC

Carbon Sensor Conductivity Meter (High concentration type)

HE-960HI
HE-960HI

Panel-mount type conductivity meter

HE-960LC
HE-960LC

Carbon Sensor Conductivity Meter

HE-960LF / FS-09F-1/2
HE-960LF / FS-09F-1/2

Flat Carbon Sensor Conductivity Meter

HE-960R-GC
HE-960R-GC

Carbon Sensor Resistivity Meter

HE-960RW
HE-960RW

Panel-mount type 2-channel electric resistivity meter (resistivity meter)

HE-960RW-GC
HE-960RW-GC

2-Channel Resistivity Meter

HF-700A
HF-700A

Low Concentration Monitor- Sulfuric Acid/Hydrogen Peroxide

HF-960H
HF-960H

HF / HCl Concentration Monitor

HF-960M
HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

HO-200
HO-200

Field-installation type ORP meter

HO-300
HO-300

Field-installation type ORP meter

HO-480
HO-480

Panel-mount type ORP meter

HR-200
HR-200

Field-installation type polarographic residual chlorine meter

HR-200RT
HR-200RT

Field-installation type residual chlorine meter

HR-480
HR-480

Panel-mount type galvanic residual chlorine meter

HT-110
HT-110

On-line TOC analyzer

HZ-960HPO-M
HZ-960HPO-M

H2O2 Monitor

LAQUA DO210
LAQUA DO210

Handheld Dissolved Oxygen/Temperature Meter

LAQUA DO220
LAQUA DO220

Handheld Dissolved Oxygen/Temperature Meter

LAQUA DS-72
LAQUA DS-72

Benchtop Conductivity/Resistivity/Total Dissolved Solids/Salinity/Temperature Meter

Water & Liquid Corporate