Monitoring of Airborne Molecular Contamination in Clean Room of Electronics Industry
Principle | Cross flow modulation type, reduced pressure chemiluminescence (CLD) |
Application | NO2, NO and NOX in ambient air |
Range | Standard ranges: 0-0.1/0.2/0.5/1.0 ppm; auto range ~ manual range selectable; |
Repeatability | ±1.0% of F.S. |
Linearity | ±1.0% of F.S. |
Sample gas flow rate | Approx. 0.8L/min |
Indication | Measured value, range, alarm, maintenance screen |
Alarms | During AIC, zero calibration error, span calibration error, temperature error in converter, etc. |
On-screen messages are available in four languages | English, German, French, and Japanese. |
Input/output | • 0-1 V/0-10 V/4-20 mA, to be specified (2 systems: either (1) momentary value and integrated or (2) moving average value) |
Power | 100/110/115/120/220/230/240 VAC, 50/60 Hz (to be specified) |
Dimensions | 430(W) x 550(D) x 221(H) mm |
Mass | Approx. 20 kg, |
** U.S. EPA designation RFNA-0506-157
![APNA-370/CU-2 [High Sensitivity Model]](http://static.horiba.com/fileadmin/Horiba/_processed_/7/4/csm_5_APNA-370_CU-2__NH3___high_sensitivity__ppb__901fa929c1.png)
