D700WR

寬範圍壓力式質量流量模組

D700WR 安裝了一款專為大範圍控制應用而設計的新型流量器，具有基於 CRITERION™ 技術的高精度性能。 D700WR可以將流量控制在全流量的0.1%以下，幫助使用者優化使用上的彈性。例如，如果系統安裝多個MFC用於高低流量控制，使用者可以減少MFC的數量並在同一位置使用另一個MFC用於不同的目的。

事業部: Semiconductor

產品分類: Fluid Control

製造商: HORIBA STEC, Co., Ltd.

請選擇一個本產品可販售的國家或區域:
China,Germany,Ireland,Israel,Italy,Japan,Korea (South),Malaysia,Singapore,Taiwan,United Kingdom,United States
瀏覽完整列表 點擊此處.

0.1～100% wide range control & high accuracy for low flow
- Provide flexibility to process optimization
≤ 500ms Step-up Response
- Deliver high productivity and greater process performance
Zero failure robust CIP pressue sensor
- Reduce down time and labor cost in high volume production
10x better valve shut-off and corrision resistance by PFA nozzle
- Robustness with less particle risk reduce down time and optimize yield
State Monitor Function
- Provide more internal data for smarter failure prediction

Output items of State monitor function

Flow/Pressure zero adjustment counts

Valve drive counts

Record of max/min P0,P1,P2 pressure

Record of max/min Block temperature

Total time over/below pressure spec.

Total time over/below temperature spec.

Total working time

Total control time

Total flow time (per calibration instance)

Total flow rate (per calibration instance)

Go to External drawing

*1 Please contact us for supported kinds of gas and glowrates.
*2 This is guaranteed value under 25 ℃ and ≤ 1.0 × 10^-3 Pa (A).
*3 Output noise is included in Repeatability.
*4 Setting time is MFC output signal and N2 gas at 23 ℃. Other detail definition follows setting time of "SEMI Standard E17-1011 Section 4.1.4".
*5 Pressure perturbation has to be smaller than 20 % pressure change per second and ±70 kPa/sec (±10 PSI/sec).
*6 The "(TYP.)" value is a representative ability value at the time of in-house verification.
*7 PFA means Poly [tetrafluoroethylene-co-perfluoro (alkyl vinyl ether)]
*8 PCTFE means Polychlorotrifluoroethylene.
*9 After installation, be sure to perform zero point adjustment refer to "D707WR Zero Adfustment Procedure".
*10 EtherCAT^® is a registered trademark and patented technology, licensed by Beckhoff Automation GmbH in Germany.