GA-370

微量氣體監測儀

用於監測空氣分離和半導體工廠生產的高純度氣體的品質控制

GA-370 可對微量雜質(CO、CO2 和 CH4)進行持續、超高靈敏度和高精度監測,用於氣體製造設施的品質控制。


Introduction and application of GA-370

產品分類: Ambient

超高靈敏度測量

  • 橫流調製雙光束非色散紅外線 (NDIR) 分析儀可提供連續、穩定的零漂移測量。

  • 最低檢測極限 (MDL) 為 10ppb,可支援需要高精度測量的應用。

 

平衡氣體中微量雜質的測量

  • 支援 N2、O2、He、Ar、H2 和空氣等代表性氣體。

 

輕鬆操作免維護

  • 操作員友善的螢幕選單簡化分析儀操作、校準和測量 無需光學對準。

  • 觸控式彩色 LCD 顯示器可讓操作員查看累積資料的圖表。

 

應用

  • 空氣分離工廠的微量雜質監測

空氣分離設備透過低溫蒸餾將大氣分離成其主要成分氧氣 (O2)、氮氣 (N2) 和氬氣 (Ar)。

空氣的分離是利用蒸餾裝置中各成分氣體的沸點差異進行的,但空氣在進入低溫蒸餾過程之前必須在預淨化裝置(PPU)中進行處理。 PPU 旨在去除空氣中的水蒸氣、二氧化碳 (CO2) 和其他雜質,以確保水和二氧化碳不會進入蒸餾裝置,導致製程堵塞並產生爆炸風險。

HORIBA GA-370 微量氣體監測儀是一款有用的工具,可連續監測分離氣體中可能存在的雜質,以實現安全控制。

此外,它還可用於測量 O2、N2 和 Ar 最終產品中的雜質(CO、CO2、CH4),以確保品質。

測量原理

  • 交叉調製雙光束非色散紅外線方法

交叉調製NDIR方法是利用電磁閥以固定週期(如1Hz)開關,使樣氣和參比氣體同步交替流入一個氣室,獲得待測氣體的調製濃度訊號。

在這個方法中,當樣氣和參考氣體為相同氣體(零點)時,不產生調製訊號。沒有旋轉扇區等機械部件,可實現長期穩定的輸出訊號。

在交叉調製雙光束NDIR方法中,使用雙光束(光源)和雙池,使樣氣和參考氣體交替流入兩個池,檢測器內部電容式麥克風的隔膜移動到與使用旋轉扇區的方法相比,向左和向右提供兩倍的信號量,從而提高訊號雜訊比。

此圖顯示了交叉調變雙光束非色散紅外線方法的雜訊水準極低且穩定。因此,即使在測量高純度氣體中微量雜質濃度時,這種零漂移方法也能提供長期穩定性和低噪音水平。


 

相關應用

 

Explore more 

▶ Hydrogen Quality Check for FCV at On-Site Hydrogen Station

Model GA-370
Gases measured CO, CO2, CH4
Bulk gases N2, O2, He, Ar, H2, Air
Number of measurement components 1 component or 2 components (specify a measuring balance gas)
Measuring principle Cross-flow modulation non-dispersive infrared (NDIR) absorption method
Measurement ranges 0 to 1/2/5/10 ppm
Lowest detection limit (2σ) 10 ppb
Repeatability ≤ ± 2% of full scale
Indication error ≤ ± 2% of full scale
Zero Drift ≤ ± 0.02 ppm/day, ≤ ± 0.03 ppm/week
Span Drift ≤ ± 2% of full scale/day, ≤ ± 2% of full scale/week
Response time (T90) 

≤ 180s

Gas flow rate Sample gas : approx. 3.5L/min, reference gas : approx. 3.5L/min, span gas: approx. 3.5L/min

Note: A delivery pressure of 50-100kPa is recommended for both sample and reference gas.

Analog output 

Max. 2 channels isolated output (2 components)

Select one from 0 to 1V, 0 to 10V, 0 to 16mA, 4 to 20mA or 0 to 20mA.

Current output : Allowable load resistance 750Ω or less

Installation conditionsAmbient temperature0 to 40°C
Ambient relative humidity≤85%
DustLess than environmental standard 
Vibration≤ 0.29m/s², at ≤ 100Hz 
External dimensions, weight 430(W) x 221(H) x 555(D) mm (excluding protrusions), approx. 18kg
Power supply 100 to 240V AC, ≤ ± 10% (max. voltage: 250V AC)
Power consumption Approx. 100VA
Monitoring of Impurity in Hydrogen Gas for FCV
Monitoring of Impurity in Hydrogen Gas for FCV
Test Gas Generation in Research and Testing Laboratories
Test Gas Generation in Research and Testing Laboratories
Low Concentration Gas Monitoring in Coal and Consumable Fuels
Low Concentration Gas Monitoring in Coal and Consumable Fuels
On-Site Hydrogen Station
On-Site Hydrogen Station

留言諮詢

如您有任何疑問,请在此留下詳細需求或問題,我們將竭誠您服務。

* 這些欄位為必填項目。

Related products

MU-2200
MU-2200

Mixed Gas Generators MU Series

SEC-8000 F/D/E Series
SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller

TFH-01/47
TFH-01/47

PTFE Filter/TFH membrane

TU Series
TU Series

Test Gas Generation Systems

FTX-ONE-CL
FTX-ONE-CL

FTIR Exhaust Gas Analyzer Dilute Measurement Type

FTX-ONE-CS/RS
FTX-ONE-CS/RS

FTIR Exhaust Gas Analyzer Direct Measurement Type

IR-300
IR-300

Vapor Concentration Monitor

IR-400
IR-400

High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring

MEXA-1170HCLD
MEXA-1170HCLD

Heated Type NOx Analyzer

MEXA-1170HFID
MEXA-1170HFID

Heated Type THC Analyzer

MEXA-1170SX
MEXA-1170SX

Motor Exhaust Gas Sulfur Analyzer

MEXA-1300R
MEXA-1300R

Motor Exhaust Gas Analyzer

MEXA-584L
MEXA-584L

Automotive Emission Analyzer

MEXA-ONE
MEXA-ONE

Motor Exhaust Gas Analyzer

MEXA-ONE-FT
MEXA-ONE-FT

FTIR Motor Exhaust Gas Analyzer

MEXA-ONE-QL-NX
MEXA-ONE-QL-NX

Laser Spectroscopic Motor Exhaust Gas Analyzer

OBS-ONE GS Unit
OBS-ONE GS Unit

On-board Emissions Measurement System

OBS-ONE-XL (IRLAM)
OBS-ONE-XL (IRLAM)

On-board NH3/N2O Measurement System for real-world driving

AP-380 Series
AP-380 Series

Air Quality Monitor

EMGA-921
EMGA-921

Hydrogen Analyzer

EMGA-Expert
EMGA-Expert

Oxygen/Nitrogen/Hydrogen Analyzer
(Flagship High-Accuracy Model)

EMGA-Pro
EMGA-Pro

Oxygen/Nitrogen Analyzer (Entry Model)

EMIA-Expert
EMIA-Expert

Carbon/Sulfur Analyzer
(Flagship High-Accuracy Model)

EMIA-Pro
EMIA-Pro

Carbon/Sulfur Analyzer (Entry Model)

EMIA-Step
EMIA-Step

Carbon/Sulfur Analyzer (Tubular Electric Resistance Heating Furnace Model)

ENDA-7000 Series
ENDA-7000 Series

Stack Gas Analyzer

IR-300
IR-300

Vapor Concentration Monitor

IR-400
IR-400

High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring

MEXA-1300R
MEXA-1300R

Motor Exhaust Gas Analyzer

MEXA-584L
MEXA-584L

Automotive Emission Analyzer

MEXA-ONE
MEXA-ONE

Motor Exhaust Gas Analyzer

OBS-ONE GS Unit
OBS-ONE GS Unit

On-board Emissions Measurement System

OBS-ONE-XL (IRLAM)
OBS-ONE-XL (IRLAM)

On-board NH3/N2O Measurement System for real-world driving

TCA-5000
TCA-5000

Hydrogen Gas Analyzer

Corporate