| Model | DZ-114S | |||||
| Specification | H | M | L | |||
| Full-scale flow rate (N2 conversion flow rate) | 80 SCCM ~ 2.9 SLM | 53 SCCM ~ 1.7 SLM | 11 SCCM ~ 450 SCCM | |||
| Operating inlet pressure | 370 ~ 900 kPa (A) | 240 ~ 369 kPa (A) | 110 ~ 239 kPa (A) | |||
| Operating differential pressure | > 350 kPa (D) | > 240 kPa (D) | > 110kPa (D) | |||
| Operating downstream pressure | ≦ 13.3 kPa (A) | ≦ 53.3 kPa (A) | ≦ 13.3 kPa (A) | ≦ 53.3 kPa (A) | ≦ 13.3 kPa (A) | ≦ 53.3 kPa (A)) |
| Control range | 1.0 ~ 100% F.S. | 2.0 ~ 100% F.S. | 2.0 ~ 100% F.S. | 4.0 ~ 100% F.S. | 5.0 ~ 100% F.S. | 10 ~100% F.S. |
| Flow rate accuracy *1,*2 | ±0.5% S.P. (20 ~ 100% F.S.) ±0.1% F.S. (1 ~ 20% F.S.) | ±0.5% S.P. (40 ~ 100% F.S.) ±0.2% F.S. (2 ~ 40% F.S.) | ±1.0% F.S. (5 ~ 100% F.S.) | |||
| Offset / Span stability | ±0.5% F.S. / year | ±1% F.S. / year | ±5% F.S. / year | |||
| Repeatability *1 | ±0.3% S.P. (10 ~ 100% F.S.) ±0.03% F.S. (1 ~ 10% F.S.) | ±0.3% S.P. (20 ~ 100% F.S.) ±0.06% F.S. (2 ~ 20% F.S.) | ±0.3% S.P. (20 ~ 100% F.S.) ±0.06% F.S. (2 ~ 20% F.S.) | ±0.3% S.P. (40 ~ 100% F.S.) ±0.12% F.S. (4 ~ 40% F.S.) | ±0.3% S.P. (5 ~ 100% F.S.) | ±0.3% S.P. (10 ~ 100% F.S.) |
| Valve type | Normally Closed / Piezo Actuator | |||||
| Step-up flow response time *3,*4 | ≦ 0.4 sec | |||||
| Valve seat leak | < 0.5% F.S. | < 1.0% F.S | < 2.0% F.S. | |||
| Proof pressure | 1.0 MPa (A) | |||||
| Leak integrity | ≦ 5.0 × 10-12 Pa m3/sec (He) | |||||
| Wetted materials | SUS316L, Ni-Alloy, PFA, PCTFE | |||||
| Operating temperature | 15~45°C | |||||
| Storage temperature | 0~80°C | |||||
| Mounting orientation | Attitude Insensitive | |||||
| Temperature measurement accuracy | ±1°C (15~45°C) | |||||
| Warm-up operation time | > 30 minutes | |||||
| Control interface *5 | DeviceNetTM Protocol | |||||
| Power supply | Master 1 PC, Slave (DZ-114S) 1PC : 8.2 VA (Slave 4.8 VA/PC) Up to 4 Slaves can be connected | |||||
*1 Flow rate accuracy and repeatability are guaranteed only for calibration gas and calibration full scale. (Outlet < 13.3 kPaA) *2 Temperature range in which “accuracy” is guaranteed is in accordance with SEMI: E56-0309. *3 Settling time is MFC output signal and N2 gas. Other detail definition follows settling time of SEMI Standard E17-1011 Section 4.1.4. *4 Step up response time is confirmed in manufacturing calibration condition. Actual response time will be gas, flow and pressure dependent. *5 Refer to the “DZ-114S DeviceNet™ Communication Manual” for details of communication. | ||||||
| Model | DZ-104M |
| Operating temperature | 15 ~ 45°C |
| Storage temperature | 0 ~ 80°C |
| Installation orientation | Attitude Insensitive |
| Control interface | Shield type micro-connector (M12), DeviceNetTM Protocol |
| Connection interface | 4 Port interlocking position : Bottom of main body |
DZ-104M Shield Type Micro Connector (M12)
| Pin Number | Signal Name | Specification |
| 1 | Drain | - |
| 2 | V+ | 11-25 VDC, Rated Voltage: 24V |
| 3 | V- | |
| 4 | CAN_H | DeviceNetTM Protocol |
| *During the series of operations, the rated voltage is used. Use power supplies and cables that are conplance with ODVA. | ||
