This liquid material vaporization method is widely used in the semiconductor, LCD panel, and optical fiber manufacturing processes that support the IT industry. The equipment is used to continuously and accurately generate vaporized gas flow rates of high-purity liquid materials.
A vaporization tank filled with liquid material and a mass flow controller that controls the vaporization gas flow rate are built into the thermostatic chamber. The vaporization gas generated inside the vaporization tank is directly controlled by the mass flow controller to generate the desired flow rate. Stainless steel is used for components that come in contact with liquid materials and vaporized gas. It can vaporize a wide range of corrosive and toxic liquid materials.
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