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Mass Flow Module

 
D700MG

D700WR

DZ-100 Series

D500 Series

SEC-Z700X Series

SEC-Z700S Series
 High speed response of 100msec and high accuracy at low flow ratesWide range control and high accuracy at small flow ratesHigh- performance model for cutting-edge processes with 10mm widthHigh- performance model for differential pressure detection methodHigh performance model with PI performanceHigh performance model with accuracy, repeatability, response performance, and particle-less
Flow Range      
Accuracy      
Response      
Pressure      
Power Supply  
Communication      
Corporate