For ultra-pure water, which is essential to semiconductor manufacturing, it is necessary to measure electric resistivity (resistivity) at a level of 18.20 MΩ cm or higher in order to ensure the required purity at the use point. However, electric resistivity measurements are largely affected by changes in the sample temperature. Even slight changes in temperature have a major impact on accurate measurement in the range of ultra-pure water.
・Measurements are impacted when there is a change in the sample temperature.
HORIBA’s Electric Resistivity Meter makes possible measurement that is not readily affected by the sample temperature by combining temperature measurement with high resolution and excellent temperature tracking with a temperature compensation calculation function.
