DeltaPsi2 Software

DeltaPsi2 Icone

A Platform for HORIBA Scientific Ellipsometers

DeltaPsi2 is an integrated software platform for thin film analysis, and drives the whole range of HORIBA Scientific spectroscopic ellipsometers and reflectometers.

Segment: Scientific
Manufacturing Company: HORIBA France SAS

DeltaPsi2 is a complete turnkey software package providing advanced measurements, modeling and reporting capabilities. It incorporates numerous functionalities for accurate and flexible characterization of thin film structures and material optical constants.

Last Release March 2016

  • Materials library update (dielectrics and metals dispersions and references)
  • Kinetic recipes released for easy live data display
  • Auto-Soft now available for UVISEL 2 ellipsometer
  • Multiwavelength system enhanced for ultra-fast mapping

DeltaPsi2 Compatibility

DeltaPsi2 is able to import ellipsometric data films (via ASCII files) to support modeling and reporting operations of any ellipsometers.

Enhance your existing modeling capabilities or Need an analysis software for thin films?
DeltaPsi2 software is the Good Choice to maximize your application success !

Flexible Measurements CapabilitiesDeltaPsi2 software provides flexible measurement capabilities, including:                                              

 
  • Reflection/Transmission Ellipsometry                                                        
  • Mueller matrix 
  • Depolarization
  • Reflectometry
  • Transmission and reflection data
  • Kinetic data
  • Scatterometry
  • Variable angle
 

    The Full Performance of Ellipsometric Analysis

    DeltaPsi2 software includes a large variety of advanced modeling functions to provide the versatility and performance required for a wide range of applications.

     
    • Complete materials library based on dispersion relations and bibliographic reference database.
    • Roughness or interface (EMA)
    • Alloy composition
    • SiGe crystallinity
    • Periodic structure
    • Graded optical constants
    • Anisotropic structure
    • Correlated layers
    • Periodic structures (1D, 2D gratings)
    • Bandgap calculation
    • Automatic backside correction
    • Ultra-thin film analysis (BLMC)
    • New Script to generate new post-calculation parameters
     

    To take advantage of the advanced modeling functions, numerous modeling features have been designed to provide the most accurate modeling processtesting the whole range of solutions to find the best model.

    • Advanced mathematical fitting algorithms
    • Multiguess, multistart
    • (n,k) fitting
    • Multi combined measurements/analysis data
    • Spectral resolution
    • Thin film non uniformity
    • And more…

    Process your Results with Unsurpassed Flexibility and Functionality

    DeltaPsi2 software provides advanced features to process ellipsometric data simply and reliably.

    • Customizable user interface
    • Data manipulation
    • Advanced features for graphic manipulation screen
    • Standard Windows® clipboard transfer
    • Import/export package function
    • Automatic reporting
    • Output description for automatic calculation of specific values after modeling
    • Online help function
     

    User Friendly Operations

    Three user modes for research, fab and quality control are designed to provide user friendly operations.

    • The research mode mainly uses drag and drop function from the left side of the treeview to the right side of the modelling area.
    • The fab mode provides a fully automatic operating environment based on automatic, push button recipes that fully automate the analysis sequence: acquisition + modelling + mapping + results.
    • The quality control mode, which is the new Auto Soft software package, is designed to provide easy operations of ellipsometric analysis.

    Simple Automatic Recipes

    recipe fully automates data acquisition+modeling+mapping+results, which facilitates routine thin film analysis.

    The design of the software allows the user to define several acquisition routines and models in a single recipe as well as several groups of points in a single grid.

    • Recipe procedure.
    • Fitting procedure.
    • Acceptance criteria for integrated quality control.
    • Conveniently access to recipe steps and original files for processing / reprocessing.
    • Statistical analysis
    • Standardized visualization of mapping results on semiconductor wafer and glass panels
    • Autofocus and pattern recognition functions.
    • Advanced communication protocols (RS232, TCP/IP)

    Request for Information

    Do you have any questions or requests? Use this form to contact our specialists. * These fields are mandatory.

    Related products

    More Auto SE

    Spectroscopic Ellipsometer for Simple Thin Film Measurement

    More Auto SE Accessories

    Customize your instrument

    More Auto Soft

    Intuitive Auto-Soft Interface for the Auto SE and Smart SE

    More DataOverlay

    Hybrid Chemical and Video Image Display

    More DLC

    Automated DLC Coating Analysis

    More EasyImage

    Optimized Analytical Workflow

    More GD-Profiler 2™

    Discover a Whole New World of Information with Glow Discharge Optical Emission Spectrometer

    More Image Enhancement

    Emphasize Raman and Optical Images

    More KnowItAll

    Raman Spectral Searching

    More LabRAM HR Evolution

    Confocal Raman Microscope

    More LabRAM Nano

    AFM-Raman for physical and chemical imaging

    More LabRAM Soleil

    Raman Microscope

    More LabRAM Soleil Nano

    Real-time and Direct Correlative Nanoscopy

    More LabSpec 6: Validated performance

    LabSpec 6 is a validated software

    More LEM Series

    Camera Endpoint Monitor based on Real Time Laser Interferometry

    More MESA-50

    X-Ray Fluorescence Analyzer

    More MESA-50K

    X-Ray Fluorescence Analyzer

    More Methods

    Recall settings, and automate processes

    More MultiPoints

    Automatic Acquisition of Raman Spectra at Multiple Positions

    More Multivariate Analysis

    Data analysis for complex data sets

    More MVAPlus

    Multivariate Analysis App for all Raman Maps

    More OneClick

    Fast and easy Raman acquisition

    More OpenPleX

    Manual label-free molecular interaction analysis machine Flexible Research Platform

    More Particle Finder

    Measure, Indentify, and Classify Particles

    More PP-TOFMS Software

    Ergonomic software for data acquisition, data treatment and technical support

    More Si Stress

    Automated Silicon Stress Analysis

    More Smart SE

    Powerful and Cost Effective Spectroscopic Ellipsometer

    More SmartSampling

    Turns Raman Imaging from Hours to Minutes

    More Spectroscopic Ellipsometer - Large area mapping Ellipsometers

    For Flat Panel Display and Photovoltaic Industries

    More User Accounts

    Password protected user access control

    More UVISEL 2 VUV

    A versatile spectroscopic ellipsometer covering a large range from VUV to NIR

    More UVISEL Plus

    Spectroscopic Ellipsometer from FUV to NIR: 190 to 2100 nm

    More UVISEL Plus In-Situ

    In-situ spectroscopic ellipsometer for real-time thin film monitoring

    More XGT-9000

    X-ray Analytical Microscope (Micro-XRF)

    More XGT-9000SL

    X-ray Analytical Microscope Super Large Chamber Model

    More XploRA Nano

    AFM-Raman for Physical and Chemical imaging

    More XploRA™ PLUS

    Raman Spectrometer - Confocal Raman Microscope