Ferroelectric Thin Films Characterization by Spectroscopic Ellipsometry PbZr1-xTixO3 & Ba1-xSrxTiO3

BST thin film deposited onto polished sapphire substrates using Pulsed Laser Deposition (PLD)

BST thin film has been deposited using Pulsed Laser Deposition (PLD) onto polished sapphire substrates. The measurement takes into account the backside reflection of transparent sapphire substrate. The model that includes an overlayer and an anisotropic substrate has been used to fit perfectly this sample.

Ferrolectric thin films have attracted much attention for potential applications such as high dielectric constant capacitors, infrared detectors, piezoelectric transducers, optical modulators, optical waveguides, nonvolatile memory chips and capacitors for dynamic random access memory (DRAM). Their ferroelectric and dielectric properties have been extensively investigated, while their optical properties have been relatively rarely studied.

However, the optical constants, e.g., refractive index and extinction coefficient have great importance for waveguiding and other optical applications. The Phase Modulated Spectroscopic Ellipsometer (PMSE) has been used to determine the optical constants of PZT and BST materials.

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