Low cost mass flow controller SEC-E40MK3/E50MK3

Vue d'ensemble

Low cost model of SEC-E series

Fonctions

  • Flow rate control valve                                                                                                                                    Solenoidl valve
  • Low cost

Fabriqué par HORIBA STEC

Caractéristiques

SEC-E40MK3

 

Materials at gas contact area

SUS316L, Viton®, PTFE,

magnetic stainless steel

Valve type

Close at power-off: C

Standard flow rate range

(N2 equivalent F.S.)

10/20/30/50/100/

200/300/500 SCCM

1/2/3/5/10 SLM

Flow rate control range

2 to 100% F.S.

Accuracy

± 1% F.S.

Types of gas

N2, O2, air, H2, Ar, He

 

 

SEC-E50MK3

 

Materials at gas contact area

SUS316L, Viton®, PTFE,

magnetic stainless steel

Valve type

Close at power-off: C

Standard flow rate range

(N2 equivalent F.S.)

20/30 SLM

 

Flow rate control range

2 to 100% F.S.

Accuracy

± 1% F.S.

Types of gas

N2, O2, air, H2, Ar, He

 

 

Schémas

SEC-E40mk3 E50mk3