Mixer Application System

HORIBA is one of the leading providers of high performance vaporization systems. HORIBA’s liquid source vaporizers are used throughout the semiconductor manufacturing process to safely and efficiently deliver liquid precursors in gas phase to the point of use. Wherever a liquid precursor requires vaporizing in vacuum or atmospheric pressure, HORIBA have a vaporizing technique to offer a vaporizing system to meet your requirements. HORIBA have more than 30 years vaporizing knowhow using direct injection, mixed injection, bubbling and baking vaporization techniques.

HORIBA’s Liquid Source Vaporization Systems can vaporize liquid materials stably and efficiently. Our vaporizers can also be linked to HORIBA’s range of automatic refill systems to provide safe and continuous delivery of vapor to the point of use. There is no downtime as bulk precursor tanks can be exchanged without interrupting the manufacturing process.

Some Liquid Materials HORIBA Has Experience With

Acetic Acid	Benzene	B(OCH3)3	BTBAS	C6F6
Cyclohexane	Decyl-TMOS	DPM	DPMS	Ethanol
Ge(OCH3)4	GeCl4	H2O	HCD	HDFDA
HMDS	HMDSO	i-Octane	IPA	Me-Cyclohexane
Methanol	n-Octane	OMCTS	OMTS	P(OCH3)3
PO(OCH3)3	SAM24	Si(CH3)4	Si(OCH3)4	SiCH3Cl3
SiCl4	SiH(OCH3)3	SiHCl3	Ta(OC2H5)5	TBTDETa
TDEAHf	TDEAT	TDMAS	TDMAT	TEB
TEMAHf	TEMAZr	TEOS	TEPO	THF
Ti(O-iPr)4	TiCl4	TMCTS	Toluene	1,3-DMA