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Sommaire » Semi-conducteurs Products Product Lines Particle Detection System

Particle Detection System

PR-PD2HR Particle detection system

Reticle / Mask Particle Detection System, PR-PD2HR

Achieves dramatic cost reductions in advanced mask inspections

HORIBA's PR-PD2 Particle Detection System

Reticle/Mask Particle Detection System, PR-PD2

High sensitive particle detection down to 0.35µm.

Compact Reticle/Mask Particle Detection System PR-PD3

Compact Reticle/Mask Particle Detection System PR-PD3

Low running costs thanks to a compact design, plus remarkable versatility

PR-PD5 Particle detection system

Low-cost Reticle/Mask Particle Detection System PR-PD5

For use in combination with Manufacturing Devices. Low-cost reticle/mask particle inspection with enhanced versatility and compactness.

Reticle/Mask Particle Remover RP-1

Reticle/Mask Particle Remover RP-1

Automatically removes particles by blow and vacuum suction

Blanks Mask Particle Detection System PR-PD2BLI

Blanks Mask Particle Detection System PR-PD2BLI

High speed and high accuracy inspection for blanks mask

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