Mass flow meters SEF-400 series

Vue d'ensemble

Since 1980, when HORIBA STEC created the SEC-L, the first mass flow controller manufactured entirely in Japan the company has continued to develop and produce mass flow controllers to meet a wide variety of customer needs. The SEC-400 series, which use thermal valves, has the same reliable control capabilities as the SEC-L, and is already used all over the world.

Fonctions

  •  High precision: ±0.5% F.S.:SEC-405(limited gas compatibility)
  • Compatible with a wide variety of flow rate control needs

    Flow rate control between 0.1SCCM and 200SLM(N2) available in a single series.
  • Compact: 106 mm between surfaces: SEC-300 type
  • Low cost: A lineup of cost effective models: SEC-400MK3/500MK3

Fabriqué par HORIBA STEC

Schémas

schematics
schematics