HF-960EM

In-line Sensor & Auto Range Switching Concentration Monitor HF-960EM

In-line Sensor & Auto Range Switching Concentration Monitor

A hydrofluoric acid concentration monitor that complies with the sanitary standards for semiconductor processes.

Incorporating a sensor with completely PFA (perfluoroalkoxy) wetted parts, size is optimized to the absolute limit.  It can also handle wide-range measurements up to 50% HF concentration, matching the sanitary requirements in semiconductor processes.

CONDChemical Concentration

DC24VTransmission OutputRS-485

Segment: Semiconductor
Fabricant: HORIBA Advanced Techno Co., Ltd.

Wide-range compatible

The auto-ranging feature, from low concentration to high concentration (up to 50% HF concentration), enables optimal measurement performance at each target concentration.

Contamination-free

Employing a sensor with a sanitary structure, using only PFA as the wetted material.  Being a chemically resistant sensor, it is capable of measuring various chemicals used in semiconductor processes.

High stability/reproducibility accuracy

It achieves a reproducibility accuracy of ±0.5% FS.

Concentration conversion function

Concentration conversion is possible by inputting the relationship between chemical concentration and conductivity along with temperature characteristics. It is particularly suitable for the dilution management of low-concentration chemical solutions.

Specifications of HF-960EM
Model nameHF-960EM
Measurement rangeHF: 0 - 50%, HCl: 0 - 10%, Conductivity: 0 - 2000 mS/cm
Repeatability+/- 0.5% F.S. (in equivalent input)
Linearity+/- 0.5% F.S. (in equivalent input)
Transmission outputNumber of output: 4
Contact outputOutputs: 5 points
Contact inputInputs: 2 points
Communication outputRS-485
Power supplyDC 24 V +/- 10% 15W
Compatible sensorCM-520 Series
Wetted material of sensorPFA

Schematics

Request for Information

Do you have any questions or requests? Use this form to contact our specialists.

* These fields are mandatory.

Related products

514-22
514-22

1.41 mS/cm Conductivity Standard Solution

514-23
514-23

12.9 mS/cm Conductivity Standard Solution

9371-10D Conductivity Cell
9371-10D Conductivity Cell

Conductivity Cell for Ultra Pure Water Measurement

CS-100 Series
CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-100F1 Series
CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

CS-600F
CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-620F
CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-700
CS-700

High Precision, High Stability Chemical Concentration Monitor

CS-900
CS-900

Non-Contact Chemical Concentration Monitor

EG-100
EG-100

Washwater Monitoring System

H-1 Series
H-1 Series

Field-installation type water quality measuring instruments

HD-960L
HD-960L

HF (Hydrofluoric Acid)  DO (Dissolved Oxygen) Monitor / Pure Water DO (Dissolved Oxygen) Monitor

HD-960LR
HD-960LR

Dissolved Oxygen Concentration Monitor Series for Semiconductor Manufacturing

HE-200C
HE-200C

Field-installation type electric conductivity meter (conductivity meter)

HE-200H
HE-200H

Field-installation type electric conductivity meter

HE-300C
HE-300C

Field-installation type electrical conductivity meter (conductivity meter)

HE-300R
HE-300R

Field-installation type electric resistivity meter (resistivity meter)

HE-480C
HE-480C

Panel-mount type conductivity meter (conductivity meter)

HE-480C-GC
HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type)

HE-480H
HE-480H

Panel-mount type conductivity meter (conductivity meter)

HE-960CA
HE-960CA

Citric Acid Monitor

HE-960CW
HE-960CW

Panel-mount type 2-channel conductivity meter (conductivity meter)

HE-960H-KOH
HE-960H-KOH

KOH Monitor

HE-960H-TM
HE-960H-TM

Wide range TMAH Concentration Monitor

HE-960H-TM-S
HE-960H-TM-S

High Precision TMAH Concentration Monitor

HE-960HC
HE-960HC

Carbon Sensor Conductivity Meter (High concentration type)

HE-960HI
HE-960HI

Panel-mount type conductivity meter

HE-960LC
HE-960LC

Carbon Sensor Conductivity Meter

HE-960LF / FS-09F-1/2
HE-960LF / FS-09F-1/2

Flat Carbon Sensor Conductivity Meter

HE-960R-GC
HE-960R-GC

Carbon Sensor Resistivity Meter

HE-960RW
HE-960RW

Panel-mount type 2-channel electric resistivity meter (resistivity meter)

HE-960RW-GC
HE-960RW-GC

2-Channel Resistivity Meter

HF-700A
HF-700A

Low Concentration Monitor- Sulfuric Acid/Hydrogen Peroxide

HF-960H
HF-960H

HF / HCl Concentration Monitor

HF-960M
HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

HT-110
HT-110

On-line TOC analyzer

HZ-960
HZ-960

Dissolved Ozone Monitor

HZ-960HPO-M
HZ-960HPO-M

H2O2 Monitor

ICP Neo
ICP Neo

ICP Software

Corporate