PLATO Series Photoluminescence Mapping System

Photoluminescence Mapping System

The PLATO Series, Photoluminescence Mapping System, is a compound wafer defect inspection device utilizing the photoluminescence (PL) method.
It can measure spectral characteristics from DUV to NIR depending on the selection of excitation laser and spectroscopy. It supports 2- to 12-inch wafers, and an auto-loading type compatible with automated transport is also available in the lineup. This system enables versatile operation with dedicated software free of licensing restrictions.
It contributes to yield improvement by analyzing various parameters such as peak wavelength, intensity, film thickness, and wafer warpage.

Segment: Semiconductor

Division: Metrology

General Features

• Photoluminescence Mapping : Peak wavelength, Peak intensity, Integrated intensity, FWHM, Al contents in AlGaN layer
• Thickness mapping : Thin-film thickness of GaN layer
• Bow measurement (optional)
• 2”, 3”, 4”, 150mm, 200mm SEMI standard wafer
• 300mm SEMI standard wafer (optional)
• 3 lasers available : 213nm, 266nm, 325nm, 375nm, 405nm, 532nm, 980nm, 1064nm, etc.
• Auto focus function to measure wafers of various thicknesses without modifying the measurement recipe
• Excel, CSV export with flexible form
• SECS/GEM, MES compatible
• The most popular PL mapping system sold more than 250 units worldwide (9 countries, 63 customers)

Applications: GaN Power Device/UV-C

PLATO data: UV-C with 213nm laser

PLATO data: GaN Power device Al% with 266nm laser

Bow measurement with Displacement sensor

Applications: VCSEL and NIR LD

PLATO data: 940nm VCSEL

PLATO data: NIR for optical communication and gas sensor

Special functions of PLATO

Light source	UV	213nm, 266nm, 325nm
	VIS	375nm, 405nm, 532nm
	NIR	980nm, 1064nm
Measurement Item	DBR Measurement	Visible range, NIR range
Measurement Item	Bow Measurement	10~1000um
Laser Marking	CE-CoC, CE-DoC, KCs, S-Mark	Sapphire, Si, GaAs
Wafer Transfer	Robot type	Single-arm, Dual-arm
	Robot type	Cassette mapping sensor
	Wafer size	SEMI standard 2”, 3”, 4”, 6”, 8”, 12”
	Cassette type	Open Cassette, SMIF, FOUP
	Identification	Wafer ID reader, Cassette ID reader
Certification	CE-CoC, CE-DoC, KCs, S-Mark
Etc.	SECS/GEM

PLATO Series