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Brochures-Analyzers for Wet Process
CS-100F1 Series
Fiber Optic Type Chemical Solution Concentration Monitor
The CS-100F1 Series is equipped with fiber optics cable based on the CS-100 Series. It offers real-time, in-line measurements by directly integrating the sample cell into the cleaning system piping and by using a fiber optic cable for light signal transmission. A single concentration monitor can take up to four measurements and monitoring of multiple chemical solutions in a single-bath or single-wafer cleaning system is also possible.
Example of chemicals can be measured
Segment: Semiconductor
Division: Wet Process Control
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.
- Concentration follow-up in real-time using in-line cells
Real-time concentration monitoring is made possible by using an in-line cell that directly connects to the main piping of the cleaning system. - Multi monitoring of up to four types
A single monitor can measure up to four types of chemical solutions or ranges. You can monitor the concentrations of more than one chemical solution (or differing chemical solution ratios) in a single lot, like single-bath or single-wafer cleaning system. - Cell unit type for higher accuracy
Emphasizing stability, a cell unit type is also available that supports feedback control using a monitor output. It is also possible to keep the chemical solution concentration within an accepted range and eliminate unnecessary chemical solution changes. - Safe installation by complete isolation of electrical and measurement sections
- RoHS compliant
| Model | CS-151F1 | CS-152F1 | CS-150F1 |
|---|---|---|---|
| Target of measurement | SC-1 (ammonia/hydrogen peroxide aqueous solution) | SC-2 (hydrochloric acid/hydrogen peroxide aqueous solution) | SPM (sulfuric acid/hydrogen peroxide aqueous solution) |
| Multi-monitoring with one unit of up to 4 types of chemical solutions or ranges possible. | |||
| Measurement principle | Absorption spectrometry | ||
| Concentration computation principle | Temperature-compensated multivariate analysis | ||
| Measurement range (mass %) | NH3: 0.00% to 1.00% H2O2: 0.00% to 5.00% H2O: 94.0% to 100.0% | HCI: 0.00% to 2.00% H2O2: 0.00% to 2.00% H2O: 96.0% to 100.0% | H2SO4: 70.0% to 96.0% H2O2: 0.00% to 10.00% H2O: 4.0% to 30.0% |
| Repeatability (mass %) (within ±1% room temperature) | NH3: ±0.15% H2O2: ±0.30% H2O: ±1.5% | HCI: ±0.15% H2O2: ±0.15 % H2O: ±1.5% | H2SO4: ±0.50% H2O2: ±0.50% H2O: ±1.5% |
| ・Repeatability for the list above is for the cell unit type.Please contact us for the repeatability of the in-line cell type. ・Differences in the above list may occur depending on measurement range.(Please see our website for details.) | |||
| Sample solution temperature | 20 to 80: (when using Inline cell) 20 to 30: (when using cell unit) | ||
| Measurement cycle | Approx. 3 seconds | ||
| Content of LCD and input | • 1st component: measured concentration value (%) •Error code • 2nd component: measured concentration value (%) •Parallel concentration alarm output invalid status • 3rd component: measured concentration value (%) •Serial/parallel status • 1st and 2nd components: concentration alarm status •Background compensation data | ||
| RS-232C serial input | • Serial/parallel status switching •Parallel concentration alarm output status • Measurement data transfer request (valid/invalid) • 1st and 2nd component concentration alarm setting •Target measurement solution switching | ||
| Parallel input | 12 to 30 V DC (photocoupler insulated) • Parallel concentration alarm output • Target measurement solution switching • Background compensation | ||
| Parallel output | Open collector output (photocoupler insulated) • 1st component concentration alarm, 4 types Max. current when on: • 2nd component concentration alarm, 4 types DC 5 mA (no internal protection resistor) • Device error Max. impressed voltage when off: 30 V DC • Measuring • Target measurement solution type • Background compensation status | ||
| Solution temperature input | Terminal block connection (M3 terminal screws) • Platinum resistance temperature sensor: Pt100 (Pt100 sensor should be prepared by customers) | ||
| Analog output | • 1st component concentration alarm, 4 types: 4 to 20 mA • 2nd component concentration alarm, 4 types: 4 to 20 mA ✽We also support other measurement ranges. Please specify when ordering. | ||
| Fiber optic cable | Dedicated CS-100F1 Series fiber optic cable (25 ±15: installation temperature) | ||
| Sample cell | We can supply dedicated sample cells (inline cell or cell unit) for various kinds of chemical solutions. | ||
| Power supply | 100 V to 230 V AC (single phase) ±10%, 50/60 Hz, approx. 100 VA | ||
| Dimensions | 205 (W) x 329 (D) x 269 (H) mm 8.1 (W) x 13.0 (D) x 10.6 (H) in (excluding protruding part) | ||
| Weight | Approx. 11 kg | ||
Note: Please consult us regarding concentration monitors for chemical solutions other than those given above.
Schematics
Concentration monitor
Inline cell Cell unit
