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Brochure-CS-900_HAE-T0113C
CS-900
Non-Contact Chemical Concentration Monitor
The next generation of Wet Process. HORIBA contributes to the optimization of process by providing chemical concentration management equipment that increase yield rate.
In order to fulfil the tight chemical concentration control required in semiconductor WET process, HORIBA realizes higher functionality to meet the needs by designing compact equipment while maintaining stable measurement and carrying out operator safety through its original sensor design.
Segment: Semiconductor
Division: Wet Process Control
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.
Completely non-contact and highly stable
Zero contamination is made possible by directly connecting a sensor externally to the PFA piping. This removes the need for plumbing construction when attaching the sensor, which reduces chemical accidents. In addition, by upgrading the optical system, the equipment has been made more compact while retaining the original specifications of CS-600F*1.
High quality and stable measurement
- Zero contamination
- Equipped with temperature compensation to enable stable measurement
- Equipped with HORIBA original algorithm to compensate influence of air bubbles.
- Same repeatability and stability with conventional CS-600*1
Suppression of vibration effects
- HORIBA adopts an optical system structure that is strong against misalignment and synergizes with HORIBA original piping construction.
Space saving
Light source and light detector have been integrated into cell unit.
Panel mount display (9.6cm x 9.6cm)
Longer lifespan of light source.
Use of LED lamp Increases lifespan (5 years warranty)
Improves work safety
Semi-annually BG compensation cycle
Piping installation is not required when installing the product, which helps to reduce accidents such as chemical leak.
*1 CS-600 is HORIBA's optical liber type chemical concentration monitor.
Optical design and amplifier without using optical fiber coupled with miniaturization of sensor increase degree of freedom in installation
Direct and stable measurement is made possible for chemical with wide temperature range (20°C to 80°C)
Stability
Measurement Condition
Measurement Frequency: every 3 seconds
Moving Average: 16 times
Temperature: room temperature
Pipe Diameter: 3/4 inch
Initial Sample Concentration
NH3 : 0.95% H2O2 : 5.15% H2O: 93.9%
Measurement result
Sample (real liquid) measured for 1 hour shows excellent stability.
Easy installation and removal made possible
| Model name | Non-contact type chemical concentration monitor | ||||
|---|---|---|---|---|---|
| Model | CS-900 | ||||
| Measurement method | Absorption spectroscopy | ||||
| Concentration calculation | Temperature compensated multivariate analysis | ||||
| Measurement range/ Repeatability (mass%) | Model name | Component | Measurable range | Repeatability | Analog output range |
| CS-900-1P-1P25P5 | NH3 | 0.00%-1.20% | ±0.05% | 0.00-10.00 | |
| H2O2 | 0.00%-5.50% | ±0.10% | 0.00-10.00 | ||
| H2O | 93.3%-100.0% | ±1.0% | - | ||
CS-900-1P-P8P8 | NH3 | 0.20%-0.80% | ±0.03% | 0.00-1.00 | |
| H2O2 | 0.20%-0.80% | ±0.03% | 0.00-1.00 | ||
| H2O | 98.4%-99.6% | ±0.3% | - | ||
Conditions of measurement | 1) Measurement Frequency: every 3 seconds 2) Moving average : 16 times | ||||
Tube | PFA tube 1inch or 3/4inch (Do NOT use anti-static type PFA tube) | ||||
Sample condition*1 | Sample temperture : 20 to 80°C Sample temperture, Atmospheric temperture fluctuation : ±1 degree C (period of time: 1 hour) Sample pressure : Less than 0.2 MPa (G) Sample pressure fluctuation : Within 0.02 MPa | ||||
Power source | DC 24V | ||||
Power consumption | Apporox. 30W (Transient electric current at the time of start is excluded) | ||||
| Weight | Display unit : Apporox. 0.9kg Sensor unit: Apporox. 2.9kg | ||||
| Dimension (WxDxH) | Display unit : 96x135x96mm Sensor unit: 238x135x190mm | ||||
| Slanting angle | Sensor unit: Vertical direction within ±3 degree Lateral direction 0 to 90 degree | ||||
| Light source | 5years | ||||
| communication | Parallel I/O, RS-232C, Analog output | ||||
