HE-960H-TM

HE-960H-TM,HE-960H-KOH,HE-960H-TM-S

Wide range TMAH Concentration Monitor

Accurately measures the concentration of TMAH (Tetra Methyl Ammonium Hydroxide), which is the main component of the photoresist developer solutions in semiconductor manufacturing. Wide measurement range : 0 - 10 %. Have the chemical resistant carbon sensor.

 

Segment: Semiconductor
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

 

  • Wide range measurement
        Concentration: 0 - 10%, Conductivity: 0 - 1000 mS/cm
  • Automatic display range switching
  • Enables three types of measurement: TMAH concentration, conductivity, and temperature
  • Chemical resistant carbon sensor
  • 24 V DC power supply
  • RoHS compliant

 

 

Indication Converter

ModelHE-960H-TM
Measurement range0 - 10%
Ambient environmentTemperature: -5 to 45°C, Relative humidity: 20 to 85 % (without condensation)
Power supply24 V DC ±10%, 10 W (max.)
Protective structurePanel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type)
MassApprox. 550 g
Conforming standardsCE marking, FCC Part 15
Compatible sensorsFES-510 series (flow-type carbon sensor)

Schematics

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