HZ-960

Dissolved Ozone Monitor HZ-960,H2O2 Monitor HZ-960HPO-M

Dissolved Ozone Monitor

A dissolved ozone concentration monitor designed for semiconductor devices,  wet processing for liquid crystal and glass.

Accommodating low-concentration chemical treatment, it is ideal for measuring a wide range of dissolved ozone concentrations, up to a maximum of 500 ppm.

O3

DC24VTransmission OutputContact OutputLow Concentration

Segment: Semiconductor
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Abundant measurement options

In addition to the standard measurement range of 0-100 mg/L for ozone, it offers three additional measurement ranges.  Suggestions for the optimal range is provided.

Choice of pipe sizes

In addition to the standard 3/4 inch, choices can be made from 1/2 inch and 1 inch sizes.

High reproducibility accuracy and stability accuracy

Reproducibility accuracy within FS +/- 0.2%.

Corresponding detectorZH-10ZH-40ZH-100ZH-500
Measurement range0 - 10.00mg/L0 - 40.00mg/L0 - 100mg/L0 - 500mg/L
Supply temperature                   5 - 30 deg.C5 - 80 deg.C
Chemical contact material of detectorPFA, PTFE, quartz glass
Supply pressureWithin 0.5 MPa
Repeatability+/- 0.2% of full scale
Linearity+/- 1.0% of full scale
Transmission outputNumber of output: 2
Contact outputNumber of output: 5
Contact inputNumber of input: 2
Communication outputRS-485
Power supplyRated voltage 24 +/- 10% V DC, 15W

Schematics

Request for Information

Do you have any questions or requests? Use this form to contact our specialists.

* These fields are mandatory.

Related products

CS-100 Series
CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-100F1 Series
CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

CS-600F
CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-620F
CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-700
CS-700

High Precision, High Stability Chemical Concentration Monitor

CS-900
CS-900

Non-Contact Chemical Concentration Monitor

EG-100
EG-100

Washwater Monitoring System

HD-960L
HD-960L

HF (Hydrofluoric Acid)  DO (Dissolved Oxygen) Monitor / Pure Water DO (Dissolved Oxygen) Monitor

HD-960LR
HD-960LR

Dissolved Oxygen Concentration Monitor Series for Semiconductor Manufacturing

HE-480C-GC
HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type)

HE-960CA
HE-960CA

Citric Acid Monitor

HE-960H-KOH
HE-960H-KOH

KOH Monitor

HE-960H-TM
HE-960H-TM

Wide range TMAH Concentration Monitor

HE-960H-TM-S
HE-960H-TM-S

High Precision TMAH Concentration Monitor

HE-960HC
HE-960HC

Carbon Sensor Conductivity Meter (High concentration type)

HE-960LC
HE-960LC

Carbon Sensor Conductivity Meter

HE-960LF / FS-09F-1/2
HE-960LF / FS-09F-1/2

Flat Carbon Sensor Conductivity Meter

HE-960R-GC
HE-960R-GC

Carbon Sensor Resistivity Meter

HE-960RW-GC
HE-960RW-GC

2-Channel Resistivity Meter

HF-960EM
HF-960EM

In-line Sensor & Auto Range Switching Concentration Monitor

HF-960H
HF-960H

HF / HCl Concentration Monitor

HF-960M
HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

HT-110
HT-110

On-line TOC analyzer

HZ-960HPO-M
HZ-960HPO-M

H2O2 Monitor

ICP Neo
ICP Neo

ICP Software

OPSA-150
OPSA-150

Organic pollutant monitor

SLIA-300
SLIA-300

Highly sensitive silica monitor for ultra-pure water management in semiconductor/FPD processes

SLIA-5000
SLIA-5000

Silica analyzer

TPNA-500
TPNA-500

Automatic total nitrogen/phosphorus monitoring system

Ultima Expert LT
Ultima Expert LT

Affordable high performance ICP-OES

UP-100
UP-100

Micro Volume pH Monitor

CS-100 Series
CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-100F1 Series
CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

CS-600F
CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-620F
CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-700
CS-700

High Precision, High Stability Chemical Concentration Monitor

CS-900
CS-900

Non-Contact Chemical Concentration Monitor

EG-100
EG-100

Washwater Monitoring System

H-1 Series
H-1 Series

Field-installation type water quality measuring instruments

HF-960M
HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

HU-200SS
HU-200SS

Field-installation type MLSS meter

HU-200TB-H
HU-200TB-H

Field-installation type turbidity meter

HU-200TB-IM
HU-200TB-IM

Field-installation type turbidity/SS meter

HU-200TB-W
HU-200TB-W

Field-installation type turbidity meter

HZ-960HPO-M
HZ-960HPO-M

H2O2 Monitor

OPSA-150
OPSA-150

Organic pollutant monitor

TPNA-500
TPNA-500

Automatic total nitrogen/phosphorus monitoring system

U-50
U-50

Multi-parameter water quality checker