CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

An inline, real-time optical fiber-based chemical concentration monitor that enables measurements of chemicals used in semiconductor manufacturing processes such as cleaning and etching.

Inline real-time measurements can be obtained.  A single concentration monitor is capable of simultaneously measuring up to four types (chemicals or ranges), making it suitable for measurements in single wafer cleaning.

Chemical Concentration

AC(100-240V)Transmission OutputContact OutputRS-232C

Segment: Semiconductor
Firma produkcyjna : HORIBA Advanced Techno Co., Ltd.

Multi-monitoring

Measurements of up to four different substances (chemicals or ranges) are possible with a single concentration monitor.

Short measurement cycles and fast response time

Supports concentration management for 300mm processes with a measurement cycle of approximately 3 seconds. Precise concentration management for both multi-bath and single-bath/sheet-type cleaning equipment are supported.

One of two types can be chosen

The option is available to choose between two types: the inline cell type, which is directly integrated into the main piping and prioritizes real-time concentration tracking, or the cell unit type, which emphasizes stability and allows for feedback control using monitor outputs.

ModelCS-151F1CS-152F1CS-150F1
Target of
measurement
SC-1
(ammonia/hydrogen peroxide
aqueous solution)
SC-2
(hydrochloric acid/hydrogen
peroxide aqueous solution)
SPM
(sulfuric acid/hydrogen
peroxide aqueous solution)
Multi-monitoring with one unit of up to 4 types of chemical solutions or ranges possible.
Measurement principleAbsorption spectrometry
Concentration computation
principle
Temperature-compensated multivariate analysis
Measurement range
(mass %)
NH3: 0.00% to 1.00%
H2O2: 0.00% to 5.00%
H2O: 94.0% to 100.0%
HCI: 0.00% to 2.00%
H2O2: 0.00% to 2.00%
H2O: 96.0% to 100.0%
H2SO4: 70.0% to 96.0%
H2O2: 0.00% to 10.00%
H2O: 4.0% to 30.0%
Repeatability (mass %)
(within ±1% room temperature)
NH3: ±0.15%
H2O2: ±0.30%
H2O: ±1.5%
HCI: ±0.15%
H2O2: ±0.15 %
H2O: ±1.5%
H2SO4: ±0.50%
H2O2: ±0.50%
H2O: ±1.5%
・Repeatability for the list above is for the cell unit type.Please contact us for the repeatability of the in-line cell type.
・Differences in the above list may occur depending on measurement range.(Please see our website for details.)
Sample solution temperature20 to 80: (when using Inline cell) 20 to 30: (when using cell unit)
Measurement cycleApprox. 3 seconds
Content of
LCD and input
• 1st component: measured concentration value (%)   •Error code
• 2nd component: measured concentration value (%)  •Parallel concentration alarm output invalid status
• 3rd component: measured concentration value (%)  •Serial/parallel status
• 1st and 2nd components: concentration alarm status •Background compensation data
RS-232C serial input• Serial/parallel status switching            •Parallel concentration alarm output status
• Measurement data transfer request         (valid/invalid)
• 1st and 2nd component concentration alarm setting  •Target measurement solution switching
Parallel input12 to 30 V DC (photocoupler insulated)        • Parallel concentration alarm output
                          • Target measurement solution switching
                          • Background compensation
Parallel outputOpen collector output (photocoupler insulated)     • 1st component concentration alarm, 4 types
Max. current when on:                 • 2nd component concentration alarm, 4 types
  DC 5 mA (no internal protection resistor)        • Device error
Max. impressed voltage when off: 30 V DC       • Measuring
                           • Target measurement solution type
                           • Background compensation status
Solution temperature inputTerminal block connection (M3 terminal screws)
• Platinum resistance temperature sensor: Pt100 (Pt100 sensor should be prepared by customers)
Analog output• 1st component concentration alarm, 4 types: 4 to 20 mA
• 2nd component concentration alarm, 4 types: 4 to 20 mA
✽We also support other measurement ranges. Please specify when ordering.
Fiber optic cableDedicated CS-100F1 Series fiber optic cable (25 ±15: installation temperature)
Sample cellWe can supply dedicated sample cells (inline cell or cell unit) for various kinds of chemical solutions.
Power supply100 V to 230 V AC (single phase) ±10%, 50/60 Hz, approx. 100 VA
Dimensions205 (W) x 329 (D) x 269 (H) mm 8.1 (W) x 13.0 (D) x 10.6 (H) in (excluding protruding part)
WeightApprox. 11 kg

Note: Please consult us regarding concentration monitors for chemical solutions other than those given above.

Schematics

Concentration monitor

Inline cell                                                                                     Cell unit

              

Wniosek o udzielenie informacji

Masz pytania lub prośby? Skorzystaj z tego formularza, aby skontaktować się z naszymi specjalistami.

* Te pola są obowiązkowe.

Related products

CombiScope
CombiScope

AFM and inverted light microscopy

CS-100 Series
CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-600F
CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-620F
CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-700
CS-700

High Precision, High Stability Chemical Concentration Monitor

CS-900
CS-900

Non-Contact Chemical Concentration Monitor

EG-100
EG-100

Washwater Monitoring System

HD-960L
HD-960L

HF (Hydrofluoric Acid)  DO (Dissolved Oxygen) Monitor / Pure Water DO (Dissolved Oxygen) Monitor

HD-960LR
HD-960LR

Dissolved Oxygen Concentration Monitor Series for Semiconductor Manufacturing

HE-480C-GC
HE-480C-GC

Carbon Sensor Conductivity Meter (Low concentration type)

HE-960CA
HE-960CA

Citric Acid Monitor

HE-960H-KOH
HE-960H-KOH

KOH Monitor

HE-960H-TM
HE-960H-TM

Wide range TMAH Concentration Monitor

HE-960H-TM-S
HE-960H-TM-S

High Precision TMAH Concentration Monitor

HE-960HC
HE-960HC

Carbon Sensor Conductivity Meter (High concentration type)

HE-960LC
HE-960LC

Carbon Sensor Conductivity Meter

HE-960LF / FS-09F-1/2
HE-960LF / FS-09F-1/2

Flat Carbon Sensor Conductivity Meter

HE-960R-GC
HE-960R-GC

Carbon Sensor Resistivity Meter

HE-960RW-GC
HE-960RW-GC

2-Channel Resistivity Meter

HF-700A
HF-700A

Low Concentration Monitor- Sulfuric Acid/Hydrogen Peroxide

HF-960EM
HF-960EM

In-line Sensor & Auto Range Switching Concentration Monitor

HF-960H
HF-960H

HF / HCl Concentration Monitor

HF-960M
HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

HT-110
HT-110

On-line TOC analyzer

HZ-960
HZ-960

Dissolved Ozone Monitor

HZ-960HPO-M
HZ-960HPO-M

H2O2 Monitor

ICP Neo
ICP Neo

ICP Software

OmegaScope
OmegaScope

The AFM optical platform

OPSA-150
OPSA-150

Organic pollutant monitor

SLIA-300
SLIA-300

Highly sensitive silica monitor for ultra-pure water management in semiconductor/FPD processes

SLIA-5000
SLIA-5000

Silica analyzer

TPNA-500
TPNA-500

Automatic total nitrogen/phosphorus monitor

TRIOS
TRIOS

Versatile AFM Optical Coupling

Ultima Expert LT
Ultima Expert LT

Affordable high performance ICP-OES

UP-100
UP-100

Micro Volume pH Monitor

CS-100 Series
CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-600F
CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-620F
CS-620F

Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-700
CS-700

High Precision, High Stability Chemical Concentration Monitor

CS-900
CS-900

Non-Contact Chemical Concentration Monitor

EG-100
EG-100

Washwater Monitoring System

HF-960M
HF-960M

Low Concentration Type HF/HCl/NH3 Concentration Monitor

HU-200SS
HU-200SS

Field-installation type MLSS meter

HU-200TB-H
HU-200TB-H

Field-installation type turbidity meter

HU-200TB-IM
HU-200TB-IM

Field-installation type turbidity/SS meter

HU-200TB-W
HU-200TB-W

Field-installation type turbidity meter

HZ-960
HZ-960

Dissolved Ozone Monitor

HZ-960HPO-M
HZ-960HPO-M

H2O2 Monitor

OPSA-150
OPSA-150

Organic pollutant monitor

TPNA-500
TPNA-500

Automatic total nitrogen/phosphorus monitor

U-50
U-50

Multi-parameter water quality checker

Corporate