• Pressure Insensitive Performance
  A new high-performance Pressure Insensitive function provides a simplified gas supply system
• Multi-range, multi-gas, multi-pressure solution
  The new functions allow the user to change gas type, Full-scale flow rate, and supply pressure range
• G-LIFE (Gas Law check of Integrated Flow restrictor Equation) Self-Diagnosis function
  The advanced process health monitoring function allows operators to conduct their own tests, typically in three seconds or less for improved throughput
• High Accuracy
  Flow rate accuracy for process gas has been improved with an advanced three-dimensional adjustment
• Fast Response
  Response: < 0.8 second
  Accurate, stable flow control can be achieved 
• Dynamic Range
  Wide control range: 0.2% F.S. to 100% F.S.

Technical Article

Pressure-Based Mass Flow Control Module CRITERION D507 Series (1.7MB)

Abstract
"Recently, with the increase of application of a semiconductor device according to IoT, the latest semiconductor factories are focusing to minimize the downtime of the apparatus. Therefore, for the purpose of failure pre-detection of semiconductor tools and its components, the managed parameters of semiconductor process are increased, and its specification is getting tighter. In order to satisfy the required control criteria, the mass flow control module is required to have high-speed communication and failure pre-detecting function as well as flow rate accuracy and reproducibility, inlet pressure insensitivity performance. D507 series is lined up on D500 series to meet strict management at recent semiconductor factory."