D700MG

High Speed & Precision Pressure Insensitive Mass Flow Module

Critical semiconductor manufacturing processes continuously desire precision gas flow control devices that enable both future innovation, and lab to fab transition of leading edge memory and logic device. HORIBA's propose the new pressure based MFC D700MG, the upper compatible model of the D500MG to support customer’s challenges.

 

Сегмент: Semiconductor
Подразделение: Fluid Control
Производитель: HORIBA STEC, Co., Ltd.

Список стран и регионов, в которых доступен данный продукт:
China,Germany,Ireland,Israel,Italy,Japan,Korea (South),Malaysia,Singapore,Taiwan,United Kingdom,United States
Посмотреть полный список Нажмите здесь.

  • On-Tool Gas and Full Scale Configuration Change *Only EtherCAT 

    • Provide flexibility to process optimization  

  • 100ms Step-up Response & MFC-to-MFC deviation control 

    • Deliver high productivity and greater process performance 

  • MRMG functionality for small flow rate(Bin101 – Bin105) 

    • Provide flexibility to process requiring small flow rate 

  • Better Valve Shut-off and Corrosion Resistance by PFA nozzle 

    • Robustness with less particle risk reduce down time and optimize yield  

  • State Monitor Function 

    • Provide more internal data for smarter failure prediction  

Output items of state monitor function

Flow/Pressure zero adjustment counts 

Valve drive counts 

Record of max/min P0,P1,P2 pressure 

Record of max/min Block temperature 

Total time over/below pressure spec. 

Total time over/below temperature spec. 

Total working time 

Total control time 

Total flow time (per calibration instance) 

Total flow rate (per calibration instance) 

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