MV-2000

MV-2000 Series

Mixed Injection System Liquid Vaporizer

The MV-2000 achieves stable vaporization, even at low temperatures, using the new tornado flow method. This is suitable for vaporization a range of liquids even challenging sources such as "High-k", a liquid source which is pyrolyzed easily.

Сегмент: Semiconductor
Подразделение: Fluid Control
Производитель: HORIBA STEC, Co., Ltd.
  • Stable vaporization at low temperature using the new tornedo flow method
  • Higher flow rate vaporization (add the stability data)
  • Can vaporize a liquid source which is pyrolyzed easily

 

 
ModelMV-2000
Liquid MaterialAll liquids except those corrosive to stainless steel(ex. HCl, HF)
Setting TemperatureBy vaporization conditions(Control Valve : Max 140 ˚C Vaporizer : Max 200 ˚C)
Leak Integrity≤ 1 × 10-8 Pa·m3 /s (He)
Internal leak standard≤ 1 × 10-6 Pa·m3 /s (He)
Wetted partsSUS316L , PFA
Temperature SensorThermocouple type K (CA)
Pressure Resistance1MPa (G)
Standard FittingLiquid inlet: 1/8 VCR type Male Carrier gas inlet: 1/4 VCR type Female Gas outlet: 1/2 VCR type Male
Operating Temperature15 - 50 ˚C
OptionAir valve(Internal leak standard: ≤ 1×10-9 Pa · m3 / s(He) )
  • The generated flow rate may differ depending on the liquid material, amount of generation, generation conditions, etc. We will recommend the model most suited to your needs upon consultation.
  • The vaporizer has a heater, temperature sensor, and switch inside of it. Please contact us for more details on their specifications.

 

External Dimension

Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Liquid Source Vaporization and Supply in Research and Testing Laboratories
Liquid Source Vaporization and Supply in Research and Testing Laboratories

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