Holographic Ion Etched Lamellar Master Gratings

Holographic Ion Etched Lamellar

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HORIBA Jobin Yvon's holographic ion-etched lamellar gratings exhibit ultra-low stray light levels, making them ideal for synchrotron and soft X-ray applications. These gratings are fully compatible with the latest synchrotron systems, as they are fully engraved in the substrate material and can therefore withstand high thermal loads.

The holographic ion etching manufacturing process is compatible with most high-grade polished substrate materials, including:

  • Silicon
  • Fused Silica
  • CVD silicon carbide

HORIBA Jobin Yvon produces holographic ion-etched gratings on plano, spherical, and toroidal substrates. We can tailor the groove distribution (i.e. constant spacing, aberration correction, or VLS) to optimize gratings for the most demanding applications.

Constant Groove Density:

The groove density of the grating is defined by the interference of two plane wavefronts, resulting in a uniform and constant groove spacing along the grating length.

Aberration-Corrected Groove Density:

The groove spacing along the grating length is non-uniform, resulting from the interference of two spherical wavefronts. The non-constant groove density enables the correction of certain aberrations in the optical system.

VLS Groove Density:

The Variable Line Spacing grating displays a groove-density variation that is defined by a polynomial law. This type of grating is commonly used in synchrotron beamline designs to correct for the defocusing of a grating monochromator. HORIBA Jobin Yvon and the synchrotron community together have developed software tools to define holographic recording geometries for VLS gratings, which allows us to produce gratings according to an arbitrary polynomial VLS law.

Typical Specifications

  • Material: Silicon
  • Slope error: =0.7 µrad
  • Roughness: <0.5 nm
  • Roll off: 5 mm
  • Land to groove ratio: 0.5 to 0.6
  • Land to groove ratio tolerance: ±10%
  • Groove depth: 9 to 200 nm
  • Groove depth tolerance: ±10%
  • Coating: Pt or Au or Ni

If you are interested by a specific grating for your application, please contact your HORIBA Jobin Yvon representative.

3D AFM Grating Profile
3D AFM Grating Profile