Spectroscopic ellipsometry is a surface sensitive, non-destructive, and non-intrusive optical metrology technique widely used in the semiconductor industry to determine:
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For over 25 years, HORIBA has provided a wide range of spectroscopic ellipsometers with unique features. They are used to determine with a great accuracy the film thickness and optical properties of Oxides, Nitrides, Thin Conductive oxide, compound and organic semiconductors and many other materials.
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| Auto SE | UVISEL Plus | |
| Spectral range | 400-850nm | 190 nm-2200nm |
| Spot size | 8 spots automatically selectable | 3 spots manually selectable |
| Spot Vision | Yes | No |
| Angle of incidence | Fixed | Variable |
| Sample size | 8” | Up to 12” depending on the options |