HORIBA has over 100,000 CEM systems installed and 30 years of quality and experience, and it performs the continuous simultaneous and high-precision measurement of NOx, SO2, CO, CO2, O2, CH4 and N2O
HORIBA also contributes to monitoring quality control of manufactured high-purity gases at air separation and semiconductor plants.
High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring
Mehrkomponenten-Gasanalysator für den Prozess und CEMS
Überwachung der Luftqualität
CO, CO2, CH4 Spurengas Analysator
Stack Gas Analysis System