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Micropole System QL-100 Series Brochure
Specifications of Micropole System QL-100 Series
Micropole System QL-100 Series
Quadrupole Mass Analyzer
Micropole System QL-100 Series is one of the world’s smallest-class mass spectrometry systems*¹. The uniquely designed sensors can be replaced by the user, contributing to resource conservation by reducing process downtime and extending service life. The system does not require a differential exhaust system and enables high-accuracy monitoring even under low-vacuum conditions*².
*¹ Aug.2026. according to our resarch
*² Measured upper limit pressure of our conventional products :0.5 Pa
Measured upper limit pressure for QL-100 series:10 Pa
The Micropole System QL-100 Series consists of a Sensor and a Spectrum generator.
Even when combined, the total length is still a compact 220 mm.
The sensor's internal structure incorporates 16 rods to enhance sensitivity.
- Achieves a Measured Upper Limit Pressure of 10 Pa
With the adoption of new technology, the QL-100 achieves a measured upper limit pressure of 10 Pa. - Innovative filament structure for lifetime.
We have improved the sensor to extend filament life in corrosive gas environments.
Application
Process Gas Monitoring
Application for monitoring gas behavior inside chambers during processes.
- It enables real-time measurement and can be used in non-plasma environments.
- QL-100 can be directly attached to chambers for measurement when chamber pressure is under 10 Pa, reducing time lag.