CRITERION™ Series (D700MG)

High Speed & Precision Pressure Insensitive Mass Flow Module D700MG

Critical semiconductor manufacturing processes continuously desire precision gas flow control devices that enable both future innovation, and lab to fab transition of leading edge memory and logic device. HORIBA's propose the new pressure based MFC CRITERION™ Series D700MG, the upper compatible model of the CRITERION™ Series D500 to support customer’s challenges.

 

Segmento: Semiconductor
Divisão: Fluid Control
Fabricante: HORIBA STEC, Co., Ltd.

Lista de países e territórios onde este produto está disponível:
China,Germany,Ireland,Israel,Italy,Japan,Korea (South),Malaysia,Singapore,Taiwan,United Kingdom,United States
Ver lista completa Aqui.

  • On-Tool Gas and Full Scale Configuration Change *Only EtherCAT 

    • Provide flexibility to process optimization  

  • 100ms Step-up Response & MFC-to-MFC deviation control 

    • Deliver high productivity and greater process performance 

  • MRMG functionality for small flow rate(Bin101 – Bin105) 

    • Provide flexibility to process requiring small flow rate 

  • Better Valve Shut-off and Corrosion Resistance by PFA nozzle 

    • Robustness with less particle risk reduce down time and optimize yield  

  • State Monitor Function 

    • Provide more internal data for smarter failure prediction  

Output items of state monitor function

Flow/Pressure zero adjustment counts 

Valve drive counts 

Record of max/min P0,P1,P2 pressure 

Record of max/min Block temperature 

Total time over/below pressure spec. 

Total time over/below temperature spec. 

Total working time 

Total control time 

Total flow time (per calibration instance) 

Total flow rate (per calibration instance) 

 

Specifications of CRITERION™ Series D700MG

Go to External Drawing

Size: 1.03 MB
CRITERION™ Series D700MG Brochure

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