Auto Soft


Intuitive Auto-Soft Interface for the Auto SE and Smart SE

The HORIBA Smart SE and Auto SE spectroscopic ellipsometers also include the easy-to-use Auto Soft interface designed for fast and easy routine thin film measurement and characterization.

Segment: Scientific
Manufacturing Company: HORIBA France SAS

All of HORIBA Scientific’s spectroscopic ellipsometers are driven by the powerful and advanced DeltaPsi 2 software.  The HORIBA Smart SE and Auto SE spectroscopic ellipsometers also include the intuitive Auto Soft interface, designed for fast and easy routine thin film analysis with just one push of a button.

Key Features:

  • Easy-to-use interface
  • Fully automated data acquisition, modeling, and reporting through the use of experimental protocols
  • Complete analysis results in just seconds!
  • Includes over 50 pre-defined experimental protocols
  • Auto-calibration and built-in diagnostics
  • Ability to create multiple user accounts and to run in either operator or engineer mode

The Auto-Soft interface contains just four icons for easy navigation:  

System Control, Experimental Protocol, Data Management, and Maintenance.  Also included is an icon to directly link to the advanced DeltaPsi 2 software platform, which is included with every Horiba spectroscopic ellipsometer.   

Analyzing data with the Auto-Soft software consists of just three easy steps:

1. Load and align your sample using the system control screen

2. Choose the experimental protocol which best suits your sample

3. Obtain a report of the analysis results in just seconds, complete with a user-defined pass-fail criteria

Powerful and Advanced DeltaPsi 2 Software Platform

The powerful DeltaPsi 2 software platform allows users to create or modify acquisition routines, models, and report templates for use in new or existing experimental protocols. DeltaPsi 2 also provides the user with more advanced functions designed to measure and characterize complex samples such as periodic structures, alloys, anisotropic layers, graded index layers, and much more! For more information on DeltaPsi 2, please click here.

1 - Load Sample

  • Automatic adjustment of the sample
  • Visualisation of the spot on the sample
  • Choose your measurement site

2 - Run MeasurementSelect your experimental recipe in the ready to use application

  • database.
  • Push the Run button.
  • Measure at a single position or multiple positions to map thin
    film uniformity

3  - Accurate Results

  • Clear table provides thickness, optical constants, film uniformity
    and other material properties of the sample.
  • Thin film result status: in or out tolerance limits
  • Automatic reporting.
  • Reprocessing capability.

Request for Information

Do you have any questions or requests? Use this form to contact our specialists. * These fields are mandatory.

Related products

Auto SE
More Auto SE

Spectroscopic Ellipsometer for Simple Thin Film Measurement

Auto SE Accessories
More Auto SE Accessories

Customize your instrument

More DataOverlay

Hybrid Chemical and Video Image Display

DeltaPsi2 Software
More DeltaPsi2 Software

A Platform for HORIBA Scientific Ellipsometers

More DLC

Automated DLC Coating Analysis

More EasyImage

Optimized Analytical Workflow

GD-Profiler 2™
More GD-Profiler 2™

Discover a Whole New World of Information with Glow Discharge Optical Emission Spectrometer

Image Enhancement
More Image Enhancement

Emphasize Raman and Optical Images

More KnowItAll

Raman Spectral Searching

LabRAM HR Evolution
More LabRAM HR Evolution

Confocal Raman Microscope

LabRAM Nano
More LabRAM Nano

AFM-Raman for physical and chemical imaging

LabRAM Soleil
More LabRAM Soleil

Raman Microscope

LabRAM Soleil Nano
More LabRAM Soleil Nano

Real-time and Direct Correlative Nanoscopy

LabSpec 6: Validated performance
More LabSpec 6: Validated performance

LabSpec 6 is a validated software

LEM Series
More LEM Series

Camera Endpoint Monitor based on Real Time Laser Interferometry

More MESA-50

X-Ray Fluorescence Analyzer

More MESA-50K

X-Ray Fluorescence Analyzer

More Methods

Recall settings, and automate processes

More MultiPoints

Automatic Acquisition of Raman Spectra at Multiple Positions

Multivariate Analysis
More Multivariate Analysis

Data analysis for complex data sets

More MVAPlus

Multivariate Analysis App for all Raman Maps

More OneClick

Fast and easy Raman acquisition

More OpenPleX

Manual label-free molecular interaction analysis machine Flexible Research Platform

Particle Finder
More Particle Finder

Measure, Indentify, and Classify Particles

Si Stress
More Si Stress

Automated Silicon Stress Analysis

Smart SE
More Smart SE

Powerful and Cost Effective Spectroscopic Ellipsometer

More SmartSampling

Turns Raman Imaging from Hours to Minutes

Spectroscopic Ellipsometer - Large area mapping Ellipsometers
More Spectroscopic Ellipsometer - Large area mapping Ellipsometers

For Flat Panel Display and Photovoltaic Industries

User Accounts
More User Accounts

Password protected user access control

More UVISEL Plus

Spectroscopic Ellipsometer from FUV to NIR: 190 to 2100 nm

UVISEL Plus In-Situ
More UVISEL Plus In-Situ

In-situ spectroscopic ellipsometer for real-time thin film monitoring

More XGT-9000

X-ray Analytical Microscope (Micro-XRF)

More XGT-9000SL

X-ray Analytical Microscope Super Large Chamber Model

XploRA Nano
More XploRA Nano

AFM-Raman for Physical and Chemical imaging

More XploRA™ PLUS

Raman Spectrometer - Confocal Raman Microscope