D700T

Best Performance Pressure Insensitive Mass Flow Module

D700T is the best performance pressure-insensitive mass flow module designed for critical semiconductor manufacturing process. D700T adapted the HORIBA CRITERION pressure-based flow measure and control technology to provide industry leading repeatable and accurate performance. In addition, uniqueness of D700T is utilizing a patented advanced flow control algorithm with twin valve structure which enables customer's gas delivery system to solve multiple challenges.

Segment: Semiconductor
Oddělení: Fluid Control
Výrobní společnost: HORIBA STEC, Co., Ltd.

Výběr států a oblastí, kde je výrobek dostupný:
China,Germany,Ireland,Israel,Italy,Japan,Korea (South),Malaysia,Singapore,Taiwan,United Kingdom,United States
Zobrazit celý seznam. Zde.

  • ≤ 100 msec fast settling time across-the-board (Set to Set, Step up and Step down)
  • Inlet and outlet pressure insensitive performance
  • Advanced failure detection to diagnose pressure sensor shift, valve seat leak and flow accuracy change
  • Within 0.15 %S.P. repeatability
  • Best accuracy specification is within 0.45 %S.P.* (Standard: 0.8 %S.P.)
  • Wider Operating Temperature Range (15-60 °C)
     

*Note: D700T is single gas configuration. Ask Horiba for specification.

 

Go to External Drawing

*1  Flow rate accuracy can be guaranteed down to 0.1 SCCM N2 equivalent.
*2  This is guaranteed value under 25 ℃ and ≤ 1 × 10-3 Pa (A).  
*3  Setting time is MFC output signal and N2 gas at 25 ℃. Definition of setting time is 2 %S.P. or 0.05 %F.S. of the change in setting, whichever is larger. However, if the change in setting is less than 0.5 %F.S., 50 % of the change in setting.
*4  Pressure perturbation has to be smaller than 20 % pressure change per second and ±70 kPa/sec. (±10 PSI/sec.)
*5  Zero adjustment is required to eliminate orientation influence after installation.
*6  EtherCAT® is a registered trademark and patented technology, licensed by Beckhoff Automation GmbH in Germany.

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