SEC-Z700X Series

Pressure Insensitive Mass Flow Controller SEC-Z700X Series

Pressure Insensitive Mass Flow Controller

The SEC-Z700X Series is equipped with reliable thermal sensors and a pressure insensitive function for stable flow rate control. The on-board pressure measurement reduces the cost, size and complexity of gas delivery systems.

Pressure Insensitive
A new high-performance function provides a simplified gas supply system. Typical multi chamber gas lines have a line regulator, pressure sensor and filter to avoid the mass flow controller crosstalk phenomenon caused by pressure fluctuations. The SEC-Z700X Series demonstrates high stability and controls the gas flow without effecting the upstream and downstream pressure fluctuations. Flow rate output, temperature and pressure readings are provided.

View our MFC comparison chart here.

 

Segment: Semiconductor
Oddělení: Fluid Control
Výrobní společnost: HORIBA STEC, Co., Ltd.
  • Multi Gas / Multi Range function
    The gas type and full scale flow rate can be changed by the customer
  • Variable PID function gives high speed response (within 1 second) across the whole flow range
  • Compact gas line
    There is no need for a regulator, transducer and filter
  • Stable control of the gas flow without effect by upstream and downstream pressure fluctuations
  • Integrated Inlet Pressure Sensor
  • On board Multi display
  • Warranty 1% Set Point high accuracy
  • Ultra clean design - metal diaphragm, all stainless SUS-316L and polished surface treatment(standard).
  • Compact size
    Same fitting to fitting dimension up to 50 SLM
  • Signal compatibility
    Analog/RS485 Digital Model , DeviceNet™ Model
  • Network function
    Controlled by digital signal.

 

Požadavek na informaci

Máte nějaké dotazy nebo požadavky? Pomocí tohoto formuláře kontaktujte naše specialisty.

* Tato pole jsou povinná.

Příslušenství výrobku

Related products

CRITERION D500
CRITERION D500

Pressure Insensitive Mass Flow Module

CVS-ONE
CVS-ONE

Constant Volume Sampler

D700MG
D700MG

High Speed & Precision Pressure Insensitive Mass Flow Module

D700T
D700T

Best Performance Pressure Insensitive Mass Flow Module

D700uF
D700uF

Micro Flow Pressure Insensitive Mass Flow Module

D700WR
D700WR

Wide Range Pressure Insensitive Mass Flow Module

DZ-100
DZ-100

Ultra-thin Mass Flow Module

EXFM-ONE
EXFM-ONE

Ultrasonic Exhaust Flow Meter

FQ Series
FQ Series

Fuel Flow Measurement Systems

FS-3000
FS-3000

Thermal Flow Splitter

HyFQ-2000 Series
HyFQ-2000 Series

Hydrogen Fuel Flow Meter

LE Series
LE Series

Large Flow Liquid Source Vaporization Control System

LF-F/LV-F Series
LF-F/LV-F Series

Digital Liquid Mass Flow Meters / Controllers

LSC series
LSC series

Compact Baking System

LU Series
LU Series

Liquid Auto Refill System

MI-1000/MV-1000
MI-1000/MV-1000

Mixed Injection System Liquid Vaporizers

MV-2000
MV-2000

Mixed Injection System Liquid Vaporizer

PTFM-1000V2
PTFM-1000V2

Pitot Tube Exhaust Flow Meter

PTFM-ONE-DT
PTFM-ONE-DT

Dual Pitot Tube Exhaust Flow Meter

SEC-8000 F/D/E Series
SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller

SEC-E Series
SEC-E Series

Mass Flow Controller

SEC-N100 Series
SEC-N100 Series

Digital Mass Flow Controller

SEC-Z500X Series
SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

SEC-Z700S Series
SEC-Z700S Series

New concept Pressure Insensitive Mass Flow Module

VC Series
VC Series

Direct Liquid Injection System

AFCU-360M
AFCU-360M

Function Control Unit with Mass Flow Controllers

ASGU-370P
ASGU-370P

Automatic Span Gas Unit for Parallel calibration

ASGU-370S
ASGU-370S

Automatic Span Gas Unit for Serial calibration

ASGU-370TS
ASGU-370TS

Automatic Span Gas Unit Transferstandard

ASGU-370TS SPLIT
ASGU-370TS SPLIT

Automatic Span Gas Generator Unit for Quality control at field test

D700MG
D700MG

High Speed & Precision Pressure Insensitive Mass Flow Module

D700T
D700T

Best Performance Pressure Insensitive Mass Flow Module

D700uF
D700uF

Micro Flow Pressure Insensitive Mass Flow Module

D700WR
D700WR

Wide Range Pressure Insensitive Mass Flow Module

FS-3000
FS-3000

Thermal Flow Splitter

SEC-8000 F/D/E Series
SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller

SEC-E Series
SEC-E Series

Mass Flow Controller

SEC-N100 Series
SEC-N100 Series

Digital Mass Flow Controller

SEC-Z500X Series
SEC-Z500X Series

Multi Range/Multi Gas Digital Mass Flow Controller

SEC-Z700S Series
SEC-Z700S Series

New concept Pressure Insensitive Mass Flow Module

Corporate